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<p>We experience the same thing with our instrument.</p>
<p>Mario<br>
</p>
<div class="moz-cite-prefix">On 2023-06-22 10:28 a.m., Hollingshead,
Dave wrote:<br>
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<p class="MsoNormal">Dear Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have found that exposure of SU-8 on our
MLA150 tool (using the 375nm laser) seems to require very high
doses. Even thin ~500nm thick films (using SU-8 2000.5) have
required doses on the order of 1200mJ/cm<sup>2
</sup>to fully expose. This is 15-20x the recommended dosage
from both the datasheet and what we estimate is the exposure
dose used on our filtered contact aligners. Thicker films
follow the same trend, but not necessarily in a linear fashion
(5µm films require ~2000mJ/cm<sup>2</sup>).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am sure the bump from 365nm to 375nm
plays a role, but the magnitude of the change seems excessive.
FWIW, our other negative resists (eg. nLOF2020) seem to expose
properly at reasonable doses.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Has anyone else experienced this? Does
anyone have an explanation or any processing suggestions for
using SU-8 with an MLA?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">-Dave<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:11.25pt;background:white"><b><span
style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BA0C2F;background:white;mso-ligatures:none">Dave
Hollingshead</span></b><span
style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#3F4443;mso-ligatures:none"><br>
Manager, Research Operations<br>
<br>
</span><b><span
style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BA0C2F;mso-ligatures:none">The
Ohio State University</span></b><span
style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#3F4443;mso-ligatures:none"><br>
Nanotech West Labs<br>
Suite 100, 1381 Kinnear Rd, Columbus, OH 43212<br>
614.292.1355 Office<br>
<span style="background:white"><a
href="mailto:hollingshead.19@osu.edu"
moz-do-not-send="true"><span style="color:#0563C1">hollingshead.19@osu.edu</span></a></span>
/
<a href="http://nanotech.osu.edu" moz-do-not-send="true"><span
style="color:#BA0C2F;background:white">nanotech.osu.edu</span></a><br>
<br>
Pronouns: he/him/his<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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