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<p>Hi Vibhor,</p>
<p><br>
</p>
<p>You should look under a microscope but these look like bubbles-
either from poor adhesion or too much Hydrogen in the film (or
both).</p>
<p><br>
</p>
<p>How did you clean your sample before deposition? <br>
</p>
<p>What is the underlying material, and is it possible it has
changed?<br>
</p>
<p>Is possible that some part of the tool was changed recently?</p>
<p><br>
</p>
<p>Regards,</p>
<p>Jeremy Clark</p>
<p>Cornell Nanoscale Facility</p>
<p><br>
</p>
<div class="moz-cite-prefix">On 7/24/23 13:12, Vibhor Kumar wrote:<br>
</div>
<blockquote type="cite"
cite="mid:DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com">
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<div style="font-family: Calibri, Arial, Helvetica, sans-serif;
font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Dear labnetwork community,</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif;
font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
We are trying to deposit a-si (~100 nm) with plasmatherm PECVD.
We are using 10% silane. Our recipe worked fine in the past. But
this time we started looking some "sparkles" in the deposited
film (image attached). We cleaned the chamber with freon gas,
but still the situation is the same. </div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif;
font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif;
font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Any suggestion/s will be highly appreciated. </div>
<div class="elementToProof">
<div style="font-family: Calibri, Arial, Helvetica, sans-serif;
font-size: 12pt; color: rgb(0, 0, 0);">
<br>
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<div id="Signature">
<div>
<div style="font-family: Calibri, Arial, Helvetica,
sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Sincerely,</div>
<div style="font-family: Calibri, Arial, Helvetica,
sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
-Vibhor Kumar-</div>
<div style="font-family: Calibri, Arial, Helvetica,
sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Research Associate,</div>
<div style="font-family: Calibri, Arial, Helvetica,
sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
School of Engineering,</div>
<div style="font-family: Calibri, Arial, Helvetica,
sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Rutgers, The State University of New Jersey, NJ </div>
<div style="font-family: Calibri, Arial, Helvetica,
sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
USA.</div>
</div>
</div>
</div>
<br>
<fieldset class="moz-mime-attachment-header"></fieldset>
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