<div dir="ltr"><div class="gmail_default" style="color:#0b5394">Hi Tucson,</div><div class="gmail_default" style="color:#0b5394"><br></div><div class="gmail_default" style="color:#0b5394">We have a PVD75 system with the Torus Magkeeper guns. We run targets with and without a backing plate depending on the material. That said, all of the targets have a magnetic keeper either mounted to the backing plate or to the back of the target. The advantage of running without a backing plate is that you can go to higher power if needed. For Ti, we prefer to run the target without a backing plate, so in that case, the magnetic keeper is mounted directly to the back of the target. We have not attempted to run any targets without a keeper, and I would be hesitant to do so, as the keeper helps to ensure the target is centered and sitting in good electrical and thermal contact with the copper cooling surface. If you are running a confocal arrangement with angled cathodes, I would also be concerned that actuation of the shutter would create enough vibration to move the target in the absence of a keeper. </div><div class="gmail_default" style="color:#0b5394"><br></div><div class="gmail_default" style="color:#0b5394">Best Regards,</div><div class="gmail_default" style="color:#0b5394"><br>Matt</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Tue, Aug 15, 2023 at 3:44 PM Richelson, Tucson <<a href="mailto:tucsonr@illinois.edu">tucsonr@illinois.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-6583295691644256730">
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<p class="MsoNormal">Hello all,<u></u><u></u></p>
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<p class="MsoNormal">I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if
I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
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<p class="MsoNormal">I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.<u></u><u></u></p>
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<p class="MsoNormal">Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?<u></u><u></u></p>
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<p style="margin:0in;background:white"><i><span style="font-size:10pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">Best,</span></i><u></u><u></u></p>
<p style="margin:0in;background:white"><i><span style="font-size:10pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">Tucson Richelson</span></i><u></u><u></u></p>
<p style="margin:0in;background:white"><span style="font-size:10pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">-------------------------------------------------------------------------</span><u></u><u></u></p>
<p style="margin:0in;background:white"><b><span style="font-size:9pt;font-family:Verdana,sans-serif;color:rgb(36,36,36)">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><u></u><u></u></p>
<p style="margin:0in;background:white"><b><span style="font-size:9pt;font-family:Verdana,sans-serif;color:rgb(36,36,36)">University of Illinois</span></b><b><span style="font-size:12pt;font-family:Verdana,sans-serif;color:rgb(36,36,36)"><br>
</span></b><span style="color:rgb(36,36,36)">Rm 2118, MC-249</span><u></u><u></u></p>
<p style="margin:0in;background:white"><u><span style="color:rgb(36,36,36)">208 North Wright St. Urbana, IL 61801</span></u><u></u><u></u></p>
<p style="margin:0in;background:white"><span style="color:rgb(36,36,36)">Office: <u>+1 (217) 244-5138</u></span><u></u><u></u></p>
<p style="margin:0in;background:white"><span style="color:rgb(36,36,36)">Web: <a href="http://mntl.illinois.edu/" target="_blank"><span style="color:rgb(113,79,188)">http://mntl.illinois.edu/</span></a></span><u></u><u></u></p>
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<p style="margin:0in">Schedule training: <a href="https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com" target="_blank">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</a><u></u><u></u></p>
<p style="margin:0in"><span style="font-size:8pt;font-family:Helvetica,sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
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</div></blockquote></div><br clear="all"><div><br></div><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><p class="MsoNormal">--<br>
Matthew T. Moneck, Ph.D<br>
Executive Director, Claire & John Bertucci Nanotechnology Laboratory<br>
Electrical & Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Avenue, Pittsburgh, PA 15213-3890<br>
Phone: 412-268-5430<br>
<a href="http://ece.cmu.edu" target="_blank">ece.cmu.edu</a> <br>
<a href="http://nanofab.ece.cmu.edu" target="_blank">nanofab.ece.cmu.edu</a> </p></div></div>