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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Verdana;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
span.EmailStyle19
{mso-style-type:personal-compose;
font-family:"Times New Roman",serif;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
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<p class="MsoNormal">Hello all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if
I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
<o:p></o:p></p>
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<p class="MsoNormal">I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.<o:p></o:p></p>
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<p class="MsoNormal">Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?<o:p></o:p></p>
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<p style="margin:0in;background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Best,</span></i><o:p></o:p></p>
<p style="margin:0in;background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Tucson Richelson</span></i><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">-------------------------------------------------------------------------</span><o:p></o:p></p>
<p style="margin:0in;background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><o:p></o:p></p>
<p style="margin:0in;background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">University of Illinois</span></b><b><span style="font-size:12.0pt;font-family:"Verdana",sans-serif;color:#242424"><br>
</span></b><span style="color:#242424">Rm 2118, MC-249</span><o:p></o:p></p>
<p style="margin:0in;background:white"><u><span style="color:#242424">208 North Wright St. Urbana, IL 61801</span></u><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="color:#242424">Office: <u>+1 (217) 244-5138</u></span><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="color:#242424">Web: <a href="http://mntl.illinois.edu/"><span style="color:#714FBC">http://mntl.illinois.edu/</span></a></span><o:p></o:p></p>
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<p style="margin:0in">Schedule training: <a href="https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</a><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:8.0pt;font-family:"Helvetica",sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
to public disclosure.</span><o:p></o:p></p>
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