<div dir="ltr">Dear Tucson,<div><br></div><div>Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If it doesn't slide, then it probably works; however, I would get a new target for long-term use.</div><div><br></div><div>I would be curious about the outcome.</div><div><br></div><div>Jason Röhr</div><div>UPenn QNF</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Tue, Aug 15, 2023 at 3:42 PM Richelson, Tucson <<a href="mailto:tucsonr@illinois.edu">tucsonr@illinois.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-6951768344330892888">
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<p class="MsoNormal">Hello all,<u></u><u></u></p>
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<p class="MsoNormal">I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if
I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
<u></u><u></u></p>
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<p class="MsoNormal">I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.<u></u><u></u></p>
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<p class="MsoNormal">Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?<u></u><u></u></p>
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<p style="margin:0in;background:white"><i><span style="font-size:10pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">Best,</span></i><u></u><u></u></p>
<p style="margin:0in;background:white"><i><span style="font-size:10pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">Tucson Richelson</span></i><u></u><u></u></p>
<p style="margin:0in;background:white"><span style="font-size:10pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">-------------------------------------------------------------------------</span><u></u><u></u></p>
<p style="margin:0in;background:white"><b><span style="font-size:9pt;font-family:Verdana,sans-serif;color:rgb(36,36,36)">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><u></u><u></u></p>
<p style="margin:0in;background:white"><b><span style="font-size:9pt;font-family:Verdana,sans-serif;color:rgb(36,36,36)">University of Illinois</span></b><b><span style="font-size:12pt;font-family:Verdana,sans-serif;color:rgb(36,36,36)"><br>
</span></b><span style="color:rgb(36,36,36)">Rm 2118, MC-249</span><u></u><u></u></p>
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