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Tucson,</div>
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We also have a Pro-Line sputtering system from Lesker with Torus Mag-Keeper guns. We've sputtered Ti in this system, and our 1/4"-thick target has the keeper "washer" screwed directly into the back of the target. Lesker will typically offer this where they
can drill and tap directly into the target material, and only utilize a backing plate where necessary.</div>
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Hope that helps, and good luck!</div>
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Paul</div>
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<div class="PlainText">******************************************<br>
Paul B. Welander, Ph.D.<br>
SLAC National Accelerator Laboratory<br>
2575 Sand Hill Road, M/S 94<br>
Menlo Park, CA 94025<br>
welander@slac.stanford.edu<br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr@illinois.edu><br>
<b>Sent:</b> Tuesday, August 15, 2023 9:16 AM<br>
<b>To:</b> 'labnetwork@mtl.mit.edu' <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate</font>
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<p class="x_MsoNormal">Hello all,</p>
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<p class="x_MsoNormal">I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that
if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
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<p class="x_MsoNormal">I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.</p>
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<p class="x_MsoNormal">Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?</p>
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<p style="margin:0in; background:white"><i><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#1F497D">Best,</span></i></p>
<p style="margin:0in; background:white"><i><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#1F497D">Tucson Richelson</span></i></p>
<p style="margin:0in; background:white"><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#1F497D">-------------------------------------------------------------------------</span></p>
<p style="margin:0in; background:white"><b><span style="font-size:9.0pt; font-family:"Verdana",sans-serif; color:#242424">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b></p>
<p style="margin:0in; background:white"><b><span style="font-size:9.0pt; font-family:"Verdana",sans-serif; color:#242424">University of Illinois</span></b><b><span style="font-size:12.0pt; font-family:"Verdana",sans-serif; color:#242424"><br>
</span></b><span style="color:#242424">Rm 2118, MC-249</span></p>
<p style="margin:0in; background:white"><u><span style="color:#242424">208 North Wright St. Urbana, IL 61801</span></u></p>
<p style="margin:0in; background:white"><span style="color:#242424">Office: <u>+1 (217) 244-5138</u></span></p>
<p style="margin:0in; background:white"><span style="color:#242424">Web: <a href="http://mntl.illinois.edu/"><span style="color:#714FBC">http://mntl.illinois.edu/</span></a></span></p>
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<p style="margin:0in">Schedule training: <a href="https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</a></p>
<p style="margin:0in"><span style="font-size:8.0pt; font-family:"Helvetica",sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
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