<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:x="urn:schemas-microsoft-com:office:excel" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Verdana;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
span.EmailStyle21
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal">Hello Tuscan,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I hope all is well with you. I received a copy of your e-mail below and wanted to chime in.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">All non-magnetic targets that are used with a Mag Keeper source, do require the backing/ magnetic “keeper” for proper fit to the source. For your Ti target, we can have the “keeper” added for you (we offer this service through our Materials
group) OR we can provide the drawing showing the required hole pattern to be added locally and provide a keeper for you.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Can you confirm the target size (OD) you are using?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Jason<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div dir="ltr" style="mso-line-height-rule:exactly;-webkit-text-size-adjust:100%;font-size:1px;direction:ltr;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:1px;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;"><tr style="font-size:0;"><td align="left" style="padding:13px 0 0;vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;color:#1F497D;font-style:normal;font-weight:700;white-space:nowrap;"><tr style="font-size:16px;"><td align="left" style="padding:0;vertical-align:top;font-family:Arial;">Jason Hrebik<span style="font-family:remialcxesans;font-size:1px;color:#FFFFFF;line-height:1px;"></span></td></tr><tr style="font-size:0;"><td align="left" style="padding:0;vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;color:#1F497D;font-style:normal;font-weight:700;white-space:nowrap;"><tr style="font-size:13px;"><td align="left" style="vertical-align:top;font-family:Arial;">Senior Product Manager</td></tr><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;color:#1F497D;font-style:normal;font-weight:400;white-space:nowrap;"><tr style="font-size:10.67px;"><td align="left" style="padding:0 0 3px;vertical-align:top;font-family:Arial;">Tel: <a href="tel:+1%20(412)%20387-9116" target="_blank" id="LPlnk689713" style="text-decoration:none;color:#1F497D;">+1 (412) 387-9116</a></td></tr></table></td><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;color:#1F497D;font-style:normal;font-weight:400;white-space:nowrap;"><tr style="font-size:10.67px;"><td align="left" style="padding:0 0 3px 4px;vertical-align:top;font-family:Arial;">| Cell: <a href="tel:+1%20(412)%20735-9863" target="_blank" id="LPlnk689713" style="text-decoration:none;color:#1F497D;">+1 (412) 735-9863</a></td></tr></table></td></tr></table></td><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;color:#1F497D;font-style:normal;font-weight:400;white-space:nowrap;"><tr style="font-size:10.67px;"><td align="left" style="padding:0 0 3px 4px;vertical-align:top;font-family:Arial;">| Email: <a href="mailto:jasonh@lesker.com" target="_blank" id="LPlnk689713" style="text-decoration:none;color:#1F497D;">jasonh@lesker.com</a> </td></tr></table></td></tr></table></td></tr><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;line-height:normal;"><tr style="font-size:0;"><td align="left" style="padding:0 0 2px;vertical-align:top;"><a href="http://www.lesker.com/" target="_blank" id="LPlnk689713" style="text-decoration:none;"><img src="http://www.lesker.com/newweb/emailsignature/EmailSignature_KJLCLogoMission.png" width="250" height="59" border="0" alt="" style="width:250px;min-width:250px;max-width:250px;height:59px;min-height:59px;max-height:59px;font-size:0;" /></a></td></tr></table></td></tr></table></td></tr></table></td></tr></table></td></tr></table></td></tr><tr style="font-size:0;"><td align="left" style="padding:2px 0 0;vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="width:100%;font-size:0;color:#000001;font-style:italic;font-weight:400;white-space:nowrap;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;"><tr style="font-size:0;"><td align="left" style="vertical-align:top;line-height:normal;"><a href="https://www.instagram.com/kurtjleskerco/" target="_blank" id="LPlnk689713" style="text-decoration:none;"><img src="https://www.lesker.com/newweb/emailsignature/EmailSignature_Instagram_2020.png" border="0" alt="" style="font-size:0;" /></a></td><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;line-height:normal;"><tr style="font-size:0;"><td align="left" style="padding:0 0 0 4px;vertical-align:top;"><a href="https://www.linkedin.com/company/kurt-j--lesker-company" target="_blank" id="LPlnk689713" style="text-decoration:none;"><img src="https://www.lesker.com/newweb/emailsignature/EmailSignature_LinkedIn_2020.png" border="0" alt="" style="font-size:0;" /></a></td></tr></table></td><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;line-height:normal;"><tr style="font-size:0;"><td align="left" style="padding:0 0 0 4px;vertical-align:top;"><a href="https://twitter.com/kurtjleskerco" target="_blank" id="LPlnk689713" style="text-decoration:none;"><img src="https://www.lesker.com/newweb/emailsignature/EmailSignature_Twitter_2020.png" border="0" alt="" style="font-size:0;" /></a></td></tr></table></td></tr></table></td></tr></table></td></tr><tr style="font-size:9.33px;"><td align="left" style="vertical-align:top;font-family:Arial,sans-serif;">If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s) expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you.<br /></td></tr></table></td></tr></table></td><td align="left" style="vertical-align:top;"><table cellpadding="0" cellspacing="0" border="0" style="font-size:0;"><tr style="font-size:0;"><td style="padding:0;"> </td></tr><tr style="font-size:0;"><td style="padding:2px 0 0;"> </td></tr></table></td></tr></table></td></tr><tr style="font-size:0;"><td style="padding:5px 0 0;"> </td></tr></table></td></tr></table></div><div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Jason Rohr<br>
<b>Sent:</b> Tuesday, August 15, 2023 4:42 PM<br>
<b>To:</b> Richelson, Tucson <<a href="mailto:tucsonr@illinois.edu">tucsonr@illinois.edu</a>><br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate<o:p></o:p></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Dear Tucson,<o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If
it doesn't slide, then it probably works; however, I would get a new target for long-term use.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">I would be curious about the outcome.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Jason Röhr<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">UPenn QNF<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">On Tue, Aug 15, 2023 at 3:42 PM Richelson, Tucson <<a href="mailto:tucsonr@illinois.edu">tucsonr@illinois.edu</a>> wrote:<o:p></o:p></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC 1.0pt;padding:0in 0in 0in 6.0pt;margin-left:4.8pt;margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt">
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Hello all,<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All
of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><img border="0" width="415" height="59" style="width:4.325in;height:.6166in" id="m_-6951768344330892888Picture_x0020_1" src="cid:189fae7b9e84cff311"><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
</div>
<div id="m_-6951768344330892888ms-outlook-mobile-signature">
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
</div>
<div>
<div>
<p style="margin:0in;background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Best,</span></i><o:p></o:p></p>
<p style="margin:0in;background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Tucson Richelson</span></i><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">-------------------------------------------------------------------------</span><o:p></o:p></p>
<p style="margin:0in;background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><o:p></o:p></p>
<p style="margin:0in;background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">University of Illinois</span></b><b><span style="font-size:12.0pt;font-family:"Verdana",sans-serif;color:#242424"><br>
</span></b><span style="color:#242424">Rm 2118, MC-249</span><o:p></o:p></p>
<p style="margin:0in;background:white"><u><span style="color:#242424">208 North Wright St. Urbana, IL 61801</span></u><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="color:#242424">Office: <u>+1 (217) 244-5138</u></span><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="color:#242424">Web: <a href="https://urldefense.com/v3/__http:/mntl.illinois.edu/__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK9zvnAl-Q$" target="_blank"><span style="color:#714FBC">http://mntl.illinois.edu/</span></a></span><o:p></o:p></p>
</div>
<p style="margin:0in">Schedule training: <a href="https://urldefense.com/v3/__https:/book.ms/b/Training2@uillinoisedu.onmicrosoft.com__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK9wY4r3c8$" target="_blank">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</a><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:8.0pt;font-family:"Helvetica",sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
to public disclosure.</span><o:p></o:p></p>
</div>
</div>
</div>
</div>
</div>
<p class="MsoNormal">_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK97lfmUIE$" target="_blank">https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK97lfmUIE$</a>
<o:p></o:p></p>
</div>
</blockquote>
</div>
</div>
</body>
</html>