<div dir="auto">We use Ar for our 2-inch magnetron sputter recipes, and Xe for our ion beam sputter system - which gets us higher dep rate. The ion Beam ignites and grid cleans with cheaper Ar, but recipes switch to Xe for dep steps only.</div><div dir="auto">— Demis</div><div dir="auto"><br></div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Aug 31, 2023 at 17:04 Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu">mweiler@andrew.cmu.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><div style="line-break:after-white-space">HI Rob,<div><br></div><div>This paper may help. We did heaps of sputtering measurements for spacecraft materials at CSU…usually with Xenon…. But occasionally with Argon and Krypton. Enjoy...</div><div><br></div><div><br></div><div><div style="display:block"><div style="display:inline-block" role="link"><a style="border-radius:10px;font-family:-apple-system,Helvetica,Arial,sans-serif;display:block;width:228px;overflow:hidden;text-decoration:none" rel="nofollow" href="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf" dir="ltr" role="button" width="228" target="_blank"><table style="table-layout:fixed;border-collapse:collapse;width:228px;font-family:-apple-system,Helvetica,Arial,sans-serif;background-color:rgb(229,230,233)" cellpadding="0" cellspacing="0" border="0" width="228"><tbody style="font-family:-apple-system,Helvetica,Arial,sans-serif"><tr style="font-family:-apple-system,Helvetica,Arial,sans-serif"><td align="center" style="font-family:-apple-system,Helvetica,Arial,sans-serif"><img alt="preview.png" src="cid:18a4e6c199fcce764801" style="width:239px;max-width:100%"></td></tr><tr style="font-family:-apple-system,Helvetica,Arial,sans-serif"><td style="font-family:-apple-system,Helvetica,Arial,sans-serif"><table bgcolor="#E5E6E9" cellpadding="0" cellspacing="0" width="228" style="font-family:-apple-system,Helvetica,Arial,sans-serif;table-layout:fixed;background-color:rgb(229,230,233)"><tbody style="font-family:-apple-system,Helvetica,Arial,sans-serif"><tr style="font-family:-apple-system,Helvetica,Arial,sans-serif"><td style="padding:8px 0px;font-family:-apple-system,Helvetica,Arial,sans-serif"><div style="max-width:100%;margin:0px 16px;overflow:hidden;font-family:-apple-system,Helvetica,Arial,sans-serif"><div style="font-weight:500;font-size:12px;overflow:hidden;text-overflow:ellipsis;text-align:left;font-family:-apple-system,Helvetica,Arial,sans-serif"><a rel="nofollow" href="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf" style="text-decoration:none;font-family:-apple-system,Helvetica,Arial,sans-serif" target="_blank"><font style="font-family:-apple-system,Helvetica,Arial,sans-serif;color:rgba(0,0,0,0.847)">IEPC-2005-293</font></a></div><div style="font-weight:400;font-size:11px;overflow:hidden;text-overflow:ellipsis;text-align:left;font-family:-apple-system,Helvetica,Arial,sans-serif"><a rel="nofollow" href="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf" style="text-decoration:none;font-family:-apple-system,Helvetica,Arial,sans-serif" target="_blank"><font style="font-family:-apple-system,Helvetica,Arial,sans-serif;color:rgba(0,0,0,0.498)">PDF Document · 544 KB</font></a></div></div></td></tr></tbody></table></td></tr></tbody></table></a></div></div><div style="display:block"><br></div><div style="display:block">Best,</div><div style="display:block"><br></div><div style="display:block">Mark</div><br><div>
<div dir="auto" style="letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;line-break:after-white-space;color:rgb(0,0,0)"><div dir="auto" style="letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;line-break:after-white-space;color:rgb(0,0,0)"><div dir="auto" style="letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none;line-break:after-white-space;color:rgb(0,0,0)"><div>Mark Weiler<br>Manager, Equipment & Facilities<br>Bertucci Nanotechnology Laboratory<br>Eden Hall Nanofabrication Cleanroom<br>Carnegie Mellon University<br>P:<span style="white-space:pre-wrap"> </span>412-268-2471<br>F:<span style="white-space:pre-wrap"> </span>412-268-3497<br><a href="http://www.nanofab.ece.cmu.edu" target="_blank">http://www.nanofab.ece.cmu.edu</a><br><br></div><div>...Success consists of getting up just one more time than you fall… OG</div><div><br></div><div><br></div><div><br></div><div><br></div><div><br></div></div></div></div><br><br>
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<div><br><blockquote type="cite"><div>On Aug 31, 2023, at 12:50 PM, Macdonald, Robert (GE Aerospace, US) <<a href="mailto:robert.macdonald@ge.com" target="_blank">robert.macdonald@ge.com</a>> wrote:</div><br><div><div style="font-family:Helvetica;font-size:12px;font-style:normal;font-variant-caps:normal;font-weight:400;letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none"><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Hi all,<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">I’m wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">In practice I see Ar used for all materials.<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Any thoughts or opinions would be of interest.<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Thanks,<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Rob<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Robert MacDonald<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">MEMS Engineer<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">GE Research<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><a href="https://www.google.com/maps/search/1+Research+Circle+Niskayuna,+NY+12309?entry=gmail&source=g" style="font-family:Calibri,sans-serif">1 Research Circle</a><u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><a href="https://www.google.com/maps/search/1+Research+Circle+Niskayuna,+NY+12309?entry=gmail&source=g" style="font-family:Calibri,sans-serif">Niskayuna, NY 12309</a><u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">518 312-5646<u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><a href="mailto:Robert.macdonald@ge.com" target="_blank" style="font-family:Calibri,sans-serif">Robert.macdonald@ge.com</a><u style="font-family:Calibri,sans-serif"></u><u style="font-family:Calibri,sans-serif"></u></div><div style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><u style="font-family:Calibri,sans-serif"></u> <u 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