<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body style="overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">HI Rob,<div><br></div><div>This paper may help. We did heaps of sputtering measurements for spacecraft materials at CSU…usually with Xenon…. But occasionally with Argon and Krypton. Enjoy...</div><div><br></div><div><br></div><div><div style="display: block;"><div style="-webkit-user-select: all; -webkit-user-drag: element; display: inline-block;" class="apple-rich-link" draggable="true" role="link" data-url="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf"><a style="border-radius:10px;font-family:-apple-system, Helvetica, Arial, sans-serif;display:block;-webkit-user-select:none;width:228px;user-select:none;-webkit-user-modify:read-only;user-modify:read-only;overflow:hidden;text-decoration:none;" class="lp-rich-link" rel="nofollow" href="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf" dir="ltr" role="button" draggable="false" width="228"><table style="table-layout:fixed;border-collapse:collapse;width:228px;background-color:#E5E6E9;font-family:-apple-system, Helvetica, Arial, sans-serif;" class="lp-rich-link-emailBaseTable" cellpadding="0" cellspacing="0" border="0" width="228"><tbody><tr><td vertical-align="center" align="center"><img style="width:228px;filter:brightness(0.97);height:294px;" width="228" height="294" draggable="false" class="lp-rich-link-mediaImage" alt="preview.png" src="cid:2F808261-F7D9-4D82-A46E-3B027FBA4C9A"></td></tr><tr><td vertical-align="center"><table bgcolor="#E5E6E9" cellpadding="0" cellspacing="0" width="228" style="font-family:-apple-system, Helvetica, Arial, sans-serif;table-layout:fixed;background-color:rgba(229, 230, 233, 1);" class="lp-rich-link-captionBar"><tbody><tr><td style="padding:8px 0px 8px 0px;" class="lp-rich-link-captionBar-textStackItem"><div style="max-width:100%;margin:0px 16px 0px 16px;overflow:hidden;" class="lp-rich-link-captionBar-textStack"><div style="word-wrap:break-word;font-weight:500;font-size:12px;overflow:hidden;text-overflow:ellipsis;text-align:left;" class="lp-rich-link-captionBar-textStack-topCaption-leading"><a rel="nofollow" href="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf" style="text-decoration: none" draggable="false"><font color="#272727" style="color: rgba(0, 0, 0, 0.847059);">IEPC-2005-293</font></a></div><div style="word-wrap:break-word;font-weight:400;font-size:11px;overflow:hidden;text-overflow:ellipsis;text-align:left;" class="lp-rich-link-captionBar-textStack-bottomCaption-leading"><a rel="nofollow" href="https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf" style="text-decoration: none" draggable="false"><font color="#808080" style="color: rgba(0, 0, 0, 0.498039);">PDF Document · 544 KB</font></a></div></div></td></tr></tbody></table></td></tr></tbody></table></a></div></div><div style="display: block;"><br></div><div style="display: block;">Best,</div><div style="display: block;"><br></div><div style="display: block;">Mark</div><br><div>
<meta charset="UTF-8"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div>Mark Weiler<br>Manager, Equipment & Facilities<br>Bertucci Nanotechnology Laboratory<br>Eden Hall Nanofabrication Cleanroom<br>Carnegie Mellon University<br>P:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-2471<br>F:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-3497<br>http://www.nanofab.ece.cmu.edu<br><br></div><div>...Success consists of getting up just one more time than you fall… OG</div><div><br></div><div><br></div><div><br></div><div><br></div><div><br></div></div></div></div><br class="Apple-interchange-newline"><br class="Apple-interchange-newline">
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<div><br><blockquote type="cite"><div>On Aug 31, 2023, at 12:50 PM, Macdonald, Robert (GE Aerospace, US) <robert.macdonald@ge.com> wrote:</div><br class="Apple-interchange-newline"><div><meta charset="UTF-8"><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">Hi all,<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">I’m wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">In practice I see Ar used for all materials.<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">Any thoughts or opinions would be of interest.<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">Thanks,<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">Rob<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">Robert MacDonald<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">MEMS Engineer<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">GE Research<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">1 Research Circle<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">Niskayuna, NY 12309<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;">518 312-5646<o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><a href="mailto:Robert.macdonald@ge.com">Robert.macdonald@ge.com</a><o:p></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">labnetwork mailing list</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><a href="mailto:labnetwork@mtl.mit.edu" style="font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px;">labnetwork@mtl.mit.edu</a><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" style="font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px;">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></div></blockquote></div><br></div></body></html>