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<p class="MsoNormal">HI,<o:p></o:p></p>
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<p class="MsoNormal">At Draper we use Argon and Krypton. For sputtering on polymers we have found that Kr works better for the sputter clean and since it is larger atom it does not implant very far into the polymer and oxides.
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<p class="MsoNormal">Rick<o:p></o:p></p>
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<p class="MsoNormal"><a name="_____replyseparator"></a><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Macdonald, Robert (GE Aerospace, US)<br>
<b>Sent:</b> Thursday, August 31, 2023 12:50 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [EXTERNAL] [labnetwork] Argon vs Krypton for sputtering<o:p></o:p></p>
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<b><span style="color:#222222">CAUTION:</span></b><span style="color:#222222"> This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.
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<p class="MsoNormal">Hi all,<o:p></o:p></p>
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<p class="MsoNormal">I’m wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.<o:p></o:p></p>
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<p class="MsoNormal">In practice I see Ar used for all materials.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Any thoughts or opinions would be of interest.<o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal">Rob<o:p></o:p></p>
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<p class="MsoNormal">Robert MacDonald<o:p></o:p></p>
<p class="MsoNormal">MEMS Engineer<o:p></o:p></p>
<p class="MsoNormal">GE Research<o:p></o:p></p>
<p class="MsoNormal">1 Research Circle<o:p></o:p></p>
<p class="MsoNormal">Niskayuna, NY 12309<o:p></o:p></p>
<p class="MsoNormal">518 312-5646<o:p></o:p></p>
<p class="MsoNormal"><a href="mailto:Robert.macdonald@ge.com">Robert.macdonald@ge.com</a><o:p></o:p></p>
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