<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body style="overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">Hi, Rob,<div><br></div><div>We have EVG501 wafer bonder and EVG 810 plasma activation tools plus a third vender wafer cleaning tool and another bonding strength test tool.</div><div><br></div><div>(Listed in our cleanroom equipment website: <a href="https://cnm2.ucdavis.edu/equipment">https://cnm2.ucdavis.edu/equipment</a> ).</div><div><br></div><div>We are very happy with the tools, and the service & support from EVG have been great.</div><div><br></div><div>We purchased them in 2016 after a few years of demo testing at their facilities (paid fees to get custom bonding done and in some cases sent my students there for various testing).</div><div><br></div><div>At the time of purchase, I carefully looked into various other vendors’ tools, and we have been happy with our decision.</div><div><br></div><div>My students have been doing hydrophilic bonding between dissimilar materials (GaAs-Si, AlGaAs-Si, InP-Si, LiNbO3-Si) as well as Si-Si and SiO2-SiO2. Some others have done anodic bonding (I try to avoid sodium for my projects so I don’t do anodic bonding). I don’t allow polymers in the wafer bonding chamber, so no polymer bonding, but we do transfer printing with and without resin in another EVG tool.</div><div><br></div><div>Let me know if you need more info. </div><div><br></div><div>Best,</div><div><br></div><div>-Ben</div><div><br><div>
<meta charset="UTF-8"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">_______________________________________________________________________________<br><br>S. J. Ben Yoo<br>Joint Faculty LBL and UC Davis <br>Distinguished Professor, Department of Electrical and Computer Engineering<br>Room 3110, Kemper Hall<br>Mail Code 1915<br>University of California<br>Davis, California 95616<br>Mobile: (510) 407-2457<br>Fax: (530) 752-8428<br>email: sbyoo@ucdavis.edu<br>home page: http://sierra.ece.ucdavis.edu<br>_______________________________________________________________________________ </div></div>
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<div><br><blockquote type="cite"><div>On Sep 4, 2023, at 1:48 AM, Peter Lomax <Peter.Lomax@ed.ac.uk> wrote:</div><br class="Apple-interchange-newline"><div><meta charset="UTF-8"><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);">Hi,<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);">We have a circa 20 year old Karl Suss anodic bonder, which can also do fusion bonding. Generally works well, doesn’t have any alignment capability but has some tooling so you can align in a Karl Suss mask aligner then transfer to the bonder.<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);">If I could improve it I would make it easier for doing stacks of three wafers – this is an option for Karl Suss but expensive – we can sort of get round it with conducting copper tape.<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);">Support has been OK but seems to need something almost every time it is used! Over the ast year has probably been used 20 times and just on the one project.<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);">Cheers<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);">Peter<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></div><div><div style="border-width: 1pt medium medium; border-style: solid none none; border-color: rgb(225, 225, 225) currentcolor currentcolor; border-image: none; padding: 3pt 0cm 0cm;"><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><b><span lang="EN-US">From:</span></b><span lang="EN-US"><span class="Apple-converted-space"> </span>labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;">labnetwork-bounces@mtl.mit.edu</a>><span class="Apple-converted-space"> </span><b>On Behalf Of<span class="Apple-converted-space"> </span></b>Macdonald, Robert (GE Aerospace, US)<br><b>Sent:</b><span class="Apple-converted-space"> </span>01 September 2023 19:24<br><b>To:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;">labnetwork@mtl.mit.edu</a><br><b>Subject:</b><span class="Apple-converted-space"> </span>[labnetwork] Your favorite wafer bonder<o:p></o:p></span></div></div></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><o:p> </o:p></div><div style="border: 1.5pt dotted rgb(255, 136, 77); padding: 0cm;"><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; background: rgb(255, 242, 230);"><b><span lang="EN-US" style="font-size: 12pt; font-family: Arial, sans-serif;">This email was sent to you by someone outside the University.</span></b><span lang="EN-US" style="font-size: 12pt; font-family: "Times New Roman", serif;"><o:p></o:p></span></div><div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; background: rgb(255, 242, 230);"><span lang="EN-US" style="font-size: 10pt; font-family: Arial, sans-serif;">You should only click on links or attachments if you are certain that the email is genuine and the content is safe.<o:p></o:p></span></div></div></div><div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">Wafer bonding has advanced a great deal in the last twenty years. Industrial tools have incorporated many improvements in wafer handing and process capabilities.<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">But many of the bonders I encounter in University labs have not incorporated all those improvements.<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">I am wondering: What wafer bonder are you using in your facility? What vintage is it? How much use does it get? What types of bonds are you supporting (anodic, fusion, frit, polymer, etc)? What improvements to these tools would you like to see?<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">Thanks,<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">Rob<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><o:p> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">Robert MacDonald<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">MEMS Engineer<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">GE Research<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">1 Research Circle<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">Niskayuna, NY 12309<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US">518 312-5646<o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><a href="mailto:Robert.macdonald@ge.com" style="color: rgb(149, 79, 114); text-decoration: underline;">Robert.macdonald@ge.com</a><o:p></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US"><o:p> </o:p></span></div></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th’ ann an Oilthigh Dhùn Èideann, clàraichte an Alba, àireamh clàraidh SC005336.</span><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">labnetwork mailing list</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><a href="mailto:labnetwork@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline; font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px;">labnetwork@mtl.mit.edu</a><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" style="color: rgb(149, 79, 114); text-decoration: underline; font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px;">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></div></blockquote></div><br></div></body></html>