<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:dt="uuid:C2F41010-65B3-11d1-A29F-00AA00C14882" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><![if !supportAnnotations]><style id="dynCom" type="text/css"><!-- --></style><MailScannerScript26488 script language="JavaScript"><!--
function msoCommentShow(anchor_id, com_id)
{
if(msoBrowserCheck())
{
c = document.all(com_id);
a = document.all(anchor_id);
if (null != c && null == c.length && null != a && null == a.length)
{
var cw = c.offsetWidth;
var ch = c.offsetHeight;
var aw = a.offsetWidth;
var ah = a.offsetHeight;
var x = a.offsetLeft;
var y = a.offsetTop;
var el = a;
while (el.tagName != "BODY")
{
el = el.offsetParent;
x = x + el.offsetLeft;
y = y + el.offsetTop;
}
var bw = document.body.clientWidth;
var bh = document.body.clientHeight;
var bsl = document.body.scrollLeft;
var bst = document.body.scrollTop;
if (x + cw + ah / 2 > bw + bsl && x + aw - ah / 2 - cw >= bsl )
{ c.style.left = x + aw - ah / 2 - cw; }
else
{ c.style.left = x + ah / 2; }
if (y + ch + ah / 2 > bh + bst && y + ah / 2 - ch >= bst )
{ c.style.top = y + ah / 2 - ch; }
else
{ c.style.top = y + ah / 2; }
c.style.visibility = "visible";
} } }
function msoCommentHide(com_id)
{
if(msoBrowserCheck())
{
c = document.all(com_id);
if (null != c && null == c.length)
{
c.style.visibility = "hidden";
c.style.left = -1000;
c.style.top = -1000;
} }
}
function msoBrowserCheck()
{
ms = navigator.appVersion.indexOf("MSIE");
vers = navigator.appVersion.substring(ms + 5, ms + 6);
ie4 = (ms > 0) && (parseInt(vers) >= 4);
return ie4;
}
if (msoBrowserCheck())
{
document.styleSheets.dynCom.addRule(".msocomanchor","background: infobackground");
document.styleSheets.dynCom.addRule(".msocomoff","display: none");
document.styleSheets.dynCom.addRule(".msocomtxt","visibility: hidden");
document.styleSheets.dynCom.addRule(".msocomtxt","position: absolute");
document.styleSheets.dynCom.addRule(".msocomtxt","top: -1000");
document.styleSheets.dynCom.addRule(".msocomtxt","left: -1000");
document.styleSheets.dynCom.addRule(".msocomtxt","width: 33%");
document.styleSheets.dynCom.addRule(".msocomtxt","background: infobackground");
document.styleSheets.dynCom.addRule(".msocomtxt","color: infotext");
document.styleSheets.dynCom.addRule(".msocomtxt","border-top: 1pt solid threedlightshadow");
document.styleSheets.dynCom.addRule(".msocomtxt","border-right: 2pt solid threedshadow");
document.styleSheets.dynCom.addRule(".msocomtxt","border-bottom: 2pt solid threedshadow");
document.styleSheets.dynCom.addRule(".msocomtxt","border-left: 1pt solid threedlightshadow");
document.styleSheets.dynCom.addRule(".msocomtxt","padding: 3pt 3pt 3pt 3pt");
document.styleSheets.dynCom.addRule(".msocomtxt","z-index: 100");
}
// --></MailScannerScript26488><![endif]><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Verdana;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle22
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:1150944820;
mso-list-type:hybrid;
mso-list-template-ids:881518948 67698689 67698691 67698693 67698689 67698691 67698693 67698689 67698691 67698693;}
@list l0:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Symbol;}
@list l0:level2
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:"Courier New";}
@list l0:level3
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Wingdings;}
@list l0:level4
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Symbol;}
@list l0:level5
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:"Courier New";}
@list l0:level6
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Wingdings;}
@list l0:level7
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Symbol;}
@list l0:level8
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:"Courier New";}
@list l0:level9
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;
font-family:Wingdings;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
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<p class="MsoNormal">Hello everyone,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I want to follow up on this. Lesker reached out to me. It turns out that I was confused about the terminology.
<o:p></o:p></p>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo1">A backing plate is for brittle materials.
<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo1">A “keeper” is for targets to be magnetically secured to the gun.
<o:p></o:p></li></ul>
<p class="MsoNormal">Lesker sells them separately and we have a fabrication shop on campus that could easily drill and tap it to the target.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I want to thank everyone who reached out to me. Thank you! I feel very welcomed by this community.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><img width="212" height="282" style="width:2.2083in;height:2.9375in" id="Picture_x0020_2" src="cid:image002.png@01D9E177.ADE564B0"><img width="230" height="275" style="width:2.3958in;height:2.8645in" id="Picture_x0020_3" src="cid:image003.png@01D9E177.ADE564B0"><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal" style="background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Best,</span></i><span style="color:#242424"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Tucson Richelson</span></i><span style="color:#242424"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">-------------------------------------------------------------------------</span><span style="color:#242424"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><span style="color:#242424"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">University of Illinois</span></b><b><span style="font-size:12.0pt;font-family:"Verdana",sans-serif;color:#242424"><br>
</span></b><span style="color:#242424">Rm 2118, MC-249<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424">208 North Wright St. Urbana, IL 61801<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424">Office: +1 (217) 244-5138<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424">Web: <a href="http://mntl.illinois.edu/"><span style="color:#0563C1">http://mntl.illinois.edu/</span></a></span><o:p></o:p></p>
</div>
<p class="MsoNormal">Schedule training: <a href="https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com">
https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</a><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Helvetica",sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
to public disclosure.</span><span style="font-size:8.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Richelson, Tucson<br>
<b>Sent:</b> Tuesday, August 15, 2023 11:16 AM<br>
<b>To:</b> 'labnetwork@mtl.mit.edu' <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">Hello all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if
I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><img border="0" width="415" height="59" style="width:4.3229in;height:.6145in" id="Picture_x0020_1" src="cid:image004.png@01D9E177.ADE564B0"><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div id="ms-outlook-mobile-signature">
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<div>
<p style="margin:0in;background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Best,</span></i><o:p></o:p></p>
<p style="margin:0in;background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">Tucson Richelson</span></i><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D">-------------------------------------------------------------------------</span><o:p></o:p></p>
<p style="margin:0in;background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><o:p></o:p></p>
<p style="margin:0in;background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424">University of Illinois</span></b><b><span style="font-size:12.0pt;font-family:"Verdana",sans-serif;color:#242424"><br>
</span></b><span style="color:#242424">Rm 2118, MC-249</span><o:p></o:p></p>
<p style="margin:0in;background:white"><u><span style="color:#242424">208 North Wright St. Urbana, IL 61801</span></u><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="color:#242424">Office: <u>+1 (217) 244-5138</u></span><o:p></o:p></p>
<p style="margin:0in;background:white"><span style="color:#242424">Web: <a href="http://mntl.illinois.edu/"><span style="color:#714FBC">http://mntl.illinois.edu/</span></a></span><o:p></o:p></p>
</div>
<p style="margin:0in">Schedule training: <a href="https://urldefense.com/v3/__https:/book.ms/b/Training2@uillinoisedu.onmicrosoft.com__;!!DZ3fjg!_LLqVJ2GQX_xjtaAQ76q62PiVPrPzRozUUESYFHQgBfuYP908Gw1F2gmRO2r9L4MiY8_V_UcMhR-VUdS8p7Zgg$">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</a><o:p></o:p></p>
<p style="margin:0in"><span style="font-size:8.0pt;font-family:"Helvetica",sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
to public disclosure.</span><o:p></o:p></p>
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