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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hi Randy,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">My colleague Owain Clark passed this on to me. My name is Liam Boodhoo, I am the ECSP Commercial Processing Manager at the Southampton Nanofabrication Centre. This looks like something we can possibly
help with. Can you confirm a few things for us to be sure?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span style="mso-fareast-language:EN-US">Do the wafers have active devices on the other side of the wafer?<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span style="mso-fareast-language:EN-US">Can we use sacrificial protective layers on the other side?<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span style="mso-fareast-language:EN-US">Are there any metals that are silicon carrier lifetime killers (like copper for example)?<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span style="mso-fareast-language:EN-US">Is an edge exclusion acceptable for this process?<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">If a call is a quicker way to share information, we can set that up.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Many thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Liam <o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">Dr Liam A. Boodhoo</span></b><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none"><br>
ECSP Commercial Processing Manager</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">Southampton Nanofabrication Centre</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">University of Southampton</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">Southampton</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">SO17 1BJ</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">UK</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none"> </span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">Phone: +44 (0) 23 8059 2650</span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Microsoft JhengHei",sans-serif;color:#330000;mso-ligatures:none">Email: <a href="mailto:L.A.Boodhoo@Southampton.ac.uk" target="_blank">L.A.Boodhoo@Southampton.ac.uk</a></span><span style="color:#212121;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="mso-ligatures:none">From:</span></b><span lang="EN-US" style="mso-ligatures:none"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Randall Parker<br>
<b>Sent:</b> 14 September 2023 17:41<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] 200mm Bulk Silicon Etch Process Needed<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<div style="border:solid #8D3970 1.0pt;padding:9.0pt 9.0pt 9.0pt 9.0pt">
<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970;mso-ligatures:none">CAUTION:</span></strong><span lang="EN-US" style="font-size:10.5pt;color:#8D3970;mso-ligatures:none">
This e-mail originated outside the University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">We have a need to etch a thin layer of silicon off of 200mm wafers. The silicon layer is freshly ground and unpatterned. Etch needs to have sufficient oxide selectivity to stop within a buried oxide layer which is 0.2-1.0um
thick. Entire silicon layer needs to be removed (ex. no edge exclusion due to clamping ring).<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Requested etch is similar to removing a 10um device silicon layer off an SOI wafer and stopping in BOX layer…<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Open to wet or dry etch methods. If wet, single-sided processing is preferred to prevent etching back of wafer, but a tank etch is acceptable if a viable option exists.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Can anyone point me towards a service or lab facility that could perform this etch in low volumes (10-12 wafers/month)?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thanks for your input.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:none">Randy Parker<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:none">Sr. Process Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:none">American Semiconductor, Inc.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:none">208-336-2773, ext 23<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:none"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span lang="EN-US" style="color:red;mso-ligatures:none">All content and attachments are ASI confidential and proprietary.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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