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<p class="MsoNormal">Hello Grant,<o:p></o:p></p>
<p class="MsoNormal">We have been using Apogee 300 bake plates from Cost Effective Equipment (CEE), which is an equipment company which spun out of Brewer Science. We have found their tooling to be very reliable and easy to use. Customer service has also been
great. Our hot plates are integrated into a 4-station spin bench, but I believe the hot plate unit is the same as the standalone model. We use ours for polyimide soft bakes.
<o:p></o:p></p>
<p class="MsoNormal"><a href="https://www.costeffectiveequipment.com/products/bake-plates/">Bake Plates - Hot Plates - Bake Smarter - Cost Effective Equipment</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hope this helps.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Randy Parker</span><o:p></o:p></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">Sr. Process Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"><a href="https://americansemi.com"><span style="color:blue">American Semiconductor, Inc.</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual">208-336-2773, ext 23<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="color:red;mso-ligatures:standardcontextual">All content and attachments are ASI confidential and proprietary.<o:p></o:p></span></i></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Grant Shao<br>
<b>Sent:</b> Wednesday, October 18, 2023 1:20 PM<br>
<b>To:</b> Labnetwork (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Hello Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">A couple of our hot plates are failing/unreliable, and before we ordered new ones, I wanted to ask if anyone has recommendations on some reliable and stable hot plates, primarily being used for baking resist.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">We have a few other Corning hot plates for heated chemical work, though those are typically in use with a thermocouple sensor plugged in.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Grant<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">--<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Grant Shao<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Lab Operations Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><a href="https://snsf.stanford.edu/facilities/fab/npc">Nanopatterning Cleanroom</a>,
<a href="http://snsf.stanford.edu/">Stanford Nano Shared Facilities</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><a href="mailto:shaog@stanford.edu">shaog@stanford.edu</a> | 650.441.9042<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Spilker Building, Room 004<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">348 Via Pueblo<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Stanford, CA 94305-4088<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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