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<p class="MsoNormal"><span style="font-size:11.0pt">We also use a CEE hotplate connected to a spin coater and it has been excellent. Other than replacing the temperature controller it has be rock solid for years. It does take a long time to change temps so
we typically keep it set at 115C for our standard bake processes.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We recently bought a Wenesco standalone unit that has performed very well:
<a href="https://www.wenesco.com/wenesco-hot-plates">https://www.wenesco.com/wenesco-hot-plates</a>. It has a smaller surface area (6” x 6”) than the CEE and heats and cools slightly faster. For most of our bake temps it stabilizes within ~10 minutes.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">-Dave<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:11.25pt;background:white">
<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BA0C2F;background:white">Dave Hollingshead</span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#3F4443"><br>
Manager, Research Operations<br>
<br>
</span><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BA0C2F">The Ohio State University</span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#3F4443"><br>
Nanotech West Labs<br>
Suite 100, 1381 Kinnear Rd, Columbus, OH 43212<br>
614.292.1355 Office<br>
<span style="background:white"><a href="mailto:hollingshead.19@osu.edu">hollingshead.19@osu.edu</a></span> /
<a href="http://nanotech.osu.edu"><span style="color:#BA0C2F;background:white">nanotech.osu.edu</span></a><br>
<br>
Pronouns: he/him/his<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt">From:</span></b><span style="font-size:11.0pt"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Owain Clark<br>
<b>Sent:</b> Thursday, October 19, 2023 11:26<br>
<b>To:</b> Massey, Travis <massey21@llnl.gov>; Randall Parker <rparker@americansemi.com>; Grant Shao <shaog@stanford.edu>; Labnetwork (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white">CEE hotplates are good, ours have been reliable and the selection of bake lift pin options helps with double sided work etc. CEE are helpful and responsive also.
The only thing I would change is that they are air cooled, if possible I’d <o:p>
</o:p></span></p>
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<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt">CEE hotplates are good, ours have been reliable and the selection of bake lift pin options helps with double sided work etc. CEE are helpful and responsive also.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt">The only thing I would change is that they are air cooled, if possible I’d go back in time and try to get water cooled plates when forced cooling was desired. It’s not a huge problem but e.g.
if a user wants to run a negative resist post exposure bake of typically ~180C then the plates take a long time to come back down to the typical soft bake range of 90-110C for the next user. We run another Sawatec plate alongside our CEE bench to cope with
this. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt">BR, Owain<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt">From:</span></b><span style="font-size:11.0pt"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Massey, Travis<br>
<b>Sent:</b> 19 October 2023 01:42<br>
<b>To:</b> Randall Parker <<a href="mailto:rparker@americansemi.com">rparker@americansemi.com</a>>; Grant Shao <<a href="mailto:shaog@stanford.edu">shaog@stanford.edu</a>>; Labnetwork (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-GB" style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span style="font-size:10.5pt;color:#8D3970"> This e-mail originated outside the
University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt">Hi Grant,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">+1 for CEE hot plates for wafer bakes. We’ve been running them for many years without issues. Once the embedded computer for the attached spinner died, but CEE was responsive in getting it sorted out quickly.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Common Corning hot plates are designed for heating beakers of liquid, not wafers, so the uniformity and control/accuracy is terrible.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Travis Massey<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Lawrence Livermore National Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt">From:</span></b><span style="font-size:11.0pt"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Randall Parker<br>
<b>Sent:</b> Wednesday, October 18, 2023 3:26 PM<br>
<b>To:</b> Grant Shao <<a href="mailto:shaog@stanford.edu">shaog@stanford.edu</a>>; Labnetwork (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hello Grant,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have been using Apogee 300 bake plates from Cost Effective Equipment (CEE), which is an equipment company which spun out of Brewer Science. We have found their tooling to be very reliable and easy to use.
Customer service has also been great. Our hot plates are integrated into a 4-station spin bench, but I believe the hot plate unit is the same as the standalone model. We use ours for polyimide soft bakes.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="https://urldefense.com/v3/__https:/urldefense.us/v3/__https:/www.costeffectiveequipment.com/products/bake-plates/__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nzSW6SCwA$__;!!KGKeukY!3UJBvK5gY4DH02bivHAcD99kbTY6lJD-_VuM78-Z5FXN7HOaD93K6M4HmX1mV8fU2YmJiScoLdtuBn28OdOt8LqfoA$">Bake
Plates - Hot Plates - Bake Smarter - Cost Effective Equipment</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hope this helps.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Randy Parker</span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Sr. Process Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><a href="https://urldefense.com/v3/__https:/urldefense.us/v3/__https:/americansemi.com__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_ny1_sdmuw$__;!!KGKeukY!3UJBvK5gY4DH02bivHAcD99kbTY6lJD-_VuM78-Z5FXN7HOaD93K6M4HmX1mV8fU2YmJiScoLdtuBn28OdPNjMw3BQ$"><span style="color:blue">American
Semiconductor, Inc.</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">208-336-2773, ext 23<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt;color:red;mso-ligatures:standardcontextual">All content and attachments are ASI confidential and proprietary.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt">From:</span></b><span style="font-size:11.0pt"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Grant Shao<br>
<b>Sent:</b> Wednesday, October 18, 2023 1:20 PM<br>
<b>To:</b> Labnetwork (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Hello Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">A couple of our hot plates are failing/unreliable, and before we ordered new ones, I wanted to ask if anyone has recommendations on some reliable and stable hot plates, primarily being used for baking resist.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">We have a few other Corning hot plates for heated chemical work, though those are typically in use with a thermocouple sensor plugged in.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Grant<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">--<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Grant Shao<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Lab Operations Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><a href="https://urldefense.com/v3/__https:/urldefense.us/v3/__https:/snsf.stanford.edu/facilities/fab/npc__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nxTV1Ow0A$__;!!KGKeukY!3UJBvK5gY4DH02bivHAcD99kbTY6lJD-_VuM78-Z5FXN7HOaD93K6M4HmX1mV8fU2YmJiScoLdtuBn28OdP3iTDdQw$">Nanopatterning
Cleanroom</a>, <a href="https://urldefense.com/v3/__https:/urldefense.us/v3/__http:/snsf.stanford.edu/__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nykH154Vw$__;!!KGKeukY!3UJBvK5gY4DH02bivHAcD99kbTY6lJD-_VuM78-Z5FXN7HOaD93K6M4HmX1mV8fU2YmJiScoLdtuBn28OdPkq3jWcA$">
Stanford Nano Shared Facilities</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><a href="mailto:shaog@stanford.edu">shaog@stanford.edu</a> | 650.441.9042<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Spilker Building, Room 004<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">348 Via Pueblo<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Stanford, CA 94305-4088<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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