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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">CEE hotplates are good, ours have been reliable and the selection of bake lift pin options helps with double sided work etc. CEE are helpful and responsive also.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">The only thing I would change is that they are air cooled, if possible I’d go back in time and try to get water cooled plates when forced cooling was desired. It’s not a huge problem but e.g. if
a user wants to run a negative resist post exposure bake of typically ~180C then the plates take a long time to come back down to the typical soft bake range of 90-110C for the next user. We run another Sawatec plate alongside our CEE bench to cope with this.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">BR, Owain<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Massey, Travis<br>
<b>Sent:</b> 19 October 2023 01:42<br>
<b>To:</b> Randall Parker <rparker@americansemi.com>; Grant Shao <shaog@stanford.edu>; Labnetwork (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span lang="EN-US" style="font-size:10.5pt;color:#8D3970"> This e-mail
originated outside the University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Hi Grant,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">+1 for CEE hot plates for wafer bakes. We’ve been running them for many years without issues. Once the embedded computer for the attached spinner died, but CEE was responsive in getting it sorted out quickly.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Common Corning hot plates are designed for heating beakers of liquid, not wafers, so the uniformity and control/accuracy is terrible.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Travis Massey<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Lawrence Livermore National Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Randall Parker<br>
<b>Sent:</b> Wednesday, October 18, 2023 3:26 PM<br>
<b>To:</b> Grant Shao <<a href="mailto:shaog@stanford.edu">shaog@stanford.edu</a>>; Labnetwork (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hello Grant,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">We have been using Apogee 300 bake plates from Cost Effective Equipment (CEE), which is an equipment company which spun out of Brewer Science. We have found their tooling to be very reliable and easy to use. Customer
service has also been great. Our hot plates are integrated into a 4-station spin bench, but I believe the hot plate unit is the same as the standalone model. We use ours for polyimide soft bakes.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><a href="https://urldefense.us/v3/__https:/www.costeffectiveequipment.com/products/bake-plates/__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nzSW6SCwA$">Bake Plates
- Hot Plates - Bake Smarter - Cost Effective Equipment</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hope this helps.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:standardcontextual">Randy Parker</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:standardcontextual">Sr. Process Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:standardcontextual"><a href="https://urldefense.us/v3/__https:/americansemi.com__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_ny1_sdmuw$"><span style="color:blue">American
Semiconductor, Inc.</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:standardcontextual">208-336-2773, ext 23<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span lang="EN-US" style="color:red;mso-ligatures:standardcontextual">All content and attachments are ASI confidential and proprietary.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Grant Shao<br>
<b>Sent:</b> Wednesday, October 18, 2023 1:20 PM<br>
<b>To:</b> Labnetwork (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Reliable Hot Plates (for baking resist)?<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Hello Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">A couple of our hot plates are failing/unreliable, and before we ordered new ones, I wanted to ask if anyone has recommendations on some reliable and stable hot plates, primarily being used for
baking resist.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">We have a few other Corning hot plates for heated chemical work, though those are typically in use with a thermocouple sensor plugged in.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Grant<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">--<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Grant Shao<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Lab Operations Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><a href="https://urldefense.us/v3/__https:/snsf.stanford.edu/facilities/fab/npc__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nxTV1Ow0A$">Nanopatterning
Cleanroom</a>, <a href="https://urldefense.us/v3/__http:/snsf.stanford.edu/__;!!G2kpM7uM-TzIFchu!3IEzui9LSx-bCXS-5GYkHlOwB1tT4nAtceifqyZ8g9yfHcQOGi-y2Oit4FkIrN5UmA2tm6zEnyZM_nykH154Vw$">
Stanford Nano Shared Facilities</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt"><a href="mailto:shaog@stanford.edu">shaog@stanford.edu</a> | 650.441.9042<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Spilker Building, Room 004<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">348 Via Pueblo<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt">Stanford, CA 94305-4088<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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