<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Several people asked about cleaning the old cylinder. We have not had to cross that bridge yet. When we filled up on TDMAS we happened to have a new bubbler (the type with a conflat flange) that is NOT DOT certified and intended for user refills.
<br>
</div>
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof ContentPasted0">
When we purchased the TDMAS it was from Sigma <a href="https://www.sigmaaldrich.com/US/en/product/aldrich/759562" id="LPlnkOWALinkPreview">
https://www.sigmaaldrich.com/US/en/product/aldrich/759562</a> and was only $177/25 g. I see it is currently listed as $980/25 g but I'm not logged into the site.
<br>
</div>
<div class="_Entity _EType_OWALinkPreview _EId_OWALinkPreview _EReadonly_1">
<div id="LPBorder_GTaHR0cHM6Ly93d3cuc2lnbWFhbGRyaWNoLmNvbS9VUy9lbi9wcm9kdWN0L2FsZHJpY2gvNzU5NTYy" class="LPBorder588162" style="width: 100%; margin-top: 16px; margin-bottom: 16px; position: relative; max-width: 800px; min-width: 424px;">
<table id="LPContainer588162" role="presentation" style="padding: 12px 36px 12px 12px; width: 100%; border-width: 1px; border-style: solid; border-color: rgb(200, 200, 200); border-radius: 2px;">
<tbody>
<tr valign="top" style="border-spacing: 0px;">
<td style="width: 100%;">
<div id="LPTitle588162" style="font-size: 21px; font-weight: 300; margin-right: 8px; font-family: "wf_segoe-ui_light", "Segoe UI Light", "Segoe WP Light", "Segoe UI", "Segoe WP", Tahoma, Arial, sans-serif; margin-bottom: 12px;">
<a target="_blank" id="LPUrlAnchor588162" href="https://www.sigmaaldrich.com/US/en/product/aldrich/759562" style="text-decoration: none;">Tris(dimethylamino)silane packaged for use in deposition systems 15112-89-7</a></div>
<div id="LPDescription588162" style="font-size: 14px; max-height: 100px; font-family: "wf_segoe-ui_normal", "Segoe UI", "Segoe WP", Tahoma, Arial, sans-serif; margin-bottom: 12px; margin-right: 8px; overflow: hidden; color: rgb(102, 102, 102);">
Tris(dimethylamino)silane (N,N,N,N,N, N-Hexamethylsilanetriamine) | Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films | Buy chemicals and reagents online from
Sigma Aldrich</div>
<div id="LPMetadata588162" style="font-size: 14px; font-weight: 400; font-family: "wf_segoe-ui_normal", "Segoe UI", "Segoe WP", Tahoma, Arial, sans-serif; color: rgb(166, 166, 166);">
www.sigmaaldrich.com</div>
</td>
</tr>
</tbody>
</table>
</div>
</div>
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
The only quality control we did afterwards was depositions followed by careful ellipsometer measurements.
<br>
</div>
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Regards, <br>
</div>
<div style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Michael <br>
</div>
<div id="appendonsend"></div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> Nathanael Sieb <sieb@4dlabs.ca><br>
<b>Sent:</b> Tuesday, October 24, 2023 12:09 PM<br>
<b>To:</b> Martin, Michael <michael.martin@louisville.edu><br>
<b>Cc:</b> Hadi Esmaeilsabzali <sabzali@4dlabs.ca><br>
<b>Subject:</b> Re: [labnetwork] companies that refill ALD precursor cylinders</font>
<div> </div>
</div>
<div>
<p class="x_MsoNormal" style="line-height:12.0pt; background:#FF4D4D"><b><span style="font-size:10.0pt; color:black">CAUTION:</span></b><span style="font-size:10.0pt; color:black"> This email originated from outside of our organization. Do not click links,
open attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span></p>
<div></div>
<div>
<p>Hi Michael,</p>
<p>I'm curious about this option. We've considered it since we do have an N2 glovebox here. How did you clean your previous cylinders before filling them? Did you do any quality control after installing it in the ALD?</p>
<p><br>
</p>
<p>Thanks,<br>
Nathanael</p>
<p><br>
</p>
<div class="x_moz-cite-prefix">On 2023-10-23 2:26 p.m., Martin, Michael wrote:<br>
</div>
<blockquote type="cite"><style type="text/css" style="display:none">
<!--
p
{margin-top:0;
margin-bottom:0}
-->
</style>
<div class="x_elementToProof" style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Hi Kyle, <br>
</div>
<div class="x_elementToProof" style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
One thing you might consider is DIY. We reached out to our chemistry department and found someone with a positive pressure N2 glove box and ended up filling our TDMAS (Tris(dimethylamino)silane) ourselves. It was a little bit nerve-wracking but saved soooo
much money. <br>
</div>
<div class="x_elementToProof" style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
P.s. should anyone need ALD as a service, our tool is definitely underutilized. It is remote PEALD with SiO2, Al2O3, ZnO, and TiO2
<br>
</div>
<div class="x_elementToProof" style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
<br>
</div>
<div class="x_elementToProof" style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Regards, <br>
</div>
<div class="x_elementToProof" style="font-family:Aptos,Aptos_EmbeddedFont,Aptos_MSFontService,Calibri,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0)">
Michael <br>
</div>
<hr tabindex="-1" style="display:inline-block; width:98%">
<div id="x_divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> labnetwork
<a class="x_moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a> on behalf of Kyle Keenan
<a class="x_moz-txt-link-rfc2396E" href="mailto:kckeenan@seas.upenn.edu"><kckeenan@seas.upenn.edu></a><br>
<b>Sent:</b> Monday, October 23, 2023 1:30 PM<br>
<b>To:</b> Lab Network (<a class="x_moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>)
<a class="x_moz-txt-link-rfc2396E" href="mailto:labnetwork@mtl.mit.edu"><labnetwork@mtl.mit.edu></a><br>
<b>Subject:</b> Re: [labnetwork] companies that refill ALD precursor cylinders</font>
<div> </div>
</div>
<div>
<p class="x_x_MsoNormal" style="line-height:12.0pt; background:#FF4D4D"><b><span style="font-size:10.0pt; color:black">CAUTION:</span></b><span style="font-size:10.0pt; color:black"> This email originated from outside of our organization. Do not click links,
open attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span></p>
<div>
<div dir="ltr">
<div>Hello All,</div>
<div><br>
</div>
<div>A number of you have responded to my email, which is greatly appreciated. however, many of you have suggested Strem, the very company with which I am having an issue, as you will see if you reread the original message. If you have any suggestions other
than Strem, I would certainly like that information.</div>
<div><br>
</div>
<div>Thank you, once again.</div>
<div>Kyle<br>
</div>
</div>
<br>
<div class="x_x_gmail_quote">
<div dir="ltr" class="x_x_gmail_attr">On Wed, Oct 18, 2023 at 12:56 PM Kyle Keenan <<a href="mailto:kckeenan@seas.upenn.edu" class="x_moz-txt-link-freetext">kckeenan@seas.upenn.edu</a>> wrote:<br>
</div>
<blockquote class="x_x_gmail_quote" style="margin:0px 0px 0px
0.8ex; border-left:1px solid rgb(204,204,204); padding-left:1ex">
<div dir="ltr">
<div>Hi Folks,</div>
<div><br>
</div>
<div>Can anyone recommend a company that will refill used ALD precursor bottles with the original chemical? We normally use Strem for this purpose, but I was just informed that they have put a stop of indeterminate length to accepting used cylinders from customers,
while they review their procedures. It was suggested that I check back in a month to see where things stand, but we cannot afford to wait that long, and I would really like to avoid that extra thousands of dollars it would cost to have to buy replacement precursors
in new bottles (which have a nearly one month lead-time through Strem). <br>
</div>
<div><br>
</div>
<div>I look forward to your replies.<br>
</div>
<div><br>
</div>
<div>Thank you,<br>
</div>
<div><span class="x_x_gmail_signature_prefix">-- </span><br>
<div dir="ltr" class="x_x_gmail_signature">
<div dir="ltr">
<div>Kyle Keenan</div>
<div><br>
</div>
<div>Senior Manager - Laboratory Operations<br>
</div>
<div>Quattrone Nanofabrication Facility</div>
<div>University of Pennsylvania</div>
<div>P: 215-898-7560</div>
<div>F: 215-573-4925<br>
</div>
</div>
</div>
</div>
</div>
</blockquote>
</div>
<br clear="all">
<br>
<span class="x_x_gmail_signature_prefix">-- </span><br>
<div dir="ltr" class="x_x_gmail_signature">
<div dir="ltr">
<div>Kyle Keenan</div>
<div><br>
</div>
<div>Senior Manager - Laboratory Operations<br>
</div>
<div>Quattrone Nanofabrication Facility</div>
<div>University of Pennsylvania</div>
<div>P: 215-898-7560</div>
<div>F: 215-573-4925<br>
</div>
</div>
</div>
</div>
</div>
<br>
<fieldset class="x_moz-mime-attachment-header"></fieldset>
<pre class="x_moz-quote-pre">_______________________________________________
labnetwork mailing list
<a class="x_moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="x_moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" originalsrc="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" shash="C+c5XsQcjMFBRpTp6basrvjIa8gDGGLHOW0q9bt7MJVJs8XKN+saQmS5IcMgxF8qJZDX8MuHJXE8bUitQpjh8Ti/PJJaUYHI1PxCC2Db1Sk6I4R9BN4G7pSvB1xwIqrexAB2U362/pSLRHKHWGMAU8q4M1r+GdIegJ3Mi1BXa14=">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
</blockquote>
<div class="x_moz-signature">
<div id="x_Signature">
<p style="font-family:Arial,Helvetica,sans-serif; font-size:13.3333px"><b style="font-family:Calibri,Helvetica,sans-serif; font-size:16px"><span style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">Nathanael Sieb</span>
</b><br style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span style="font-family:Arial,Helvetica,sans-serif; font-size:10pt"><span style="font-size:10pt">Director of Operations and Administration</span>
<span style="font-size:10pt"> | <a href="http://www.4dlabs.ca/" originalsrc="http://www.4dlabs.ca/" shash="fC+qmPB41MnKPKzyrYUtzE7daQgpGgpNojX3mQiRDhonQuyyvRMv1vxtw8TDGaw3DcRc22jgm9XKRkwgUmBWSljkqhV7m2B0OopVe9WdY4E/J7xiDYSmLQxawFuZz0SfnWdPOKYW/SyPqJR3x1iPdUF5ve3gPXb3sF5NA6M9Gjk=" class="x_OWAAutoLink" id="LPNoLP" tabindex="-1" disabled="true">
4D LABS</a> </span><br style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">Simon Fraser University</span>
<br style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">8888 University Dr., Burnaby, B.C. V5A 1S6</span>
<br style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span style="font-family:Arial,Helvetica,sans-serif; font-size:10pt">T: 778.782.8084 | F: 778.782.3765 | <a href="http://www.4dlabs.ca/" originalsrc="http://www.4dlabs.ca/" shash="fC+qmPB41MnKPKzyrYUtzE7daQgpGgpNojX3mQiRDhonQuyyvRMv1vxtw8TDGaw3DcRc22jgm9XKRkwgUmBWSljkqhV7m2B0OopVe9WdY4E/J7xiDYSmLQxawFuZz0SfnWdPOKYW/SyPqJR3x1iPdUF5ve3gPXb3sF5NA6M9Gjk=" class="x_OWAAutoLink" id="LPNoLP" tabindex="-1" disabled="true">www.4dlabs.ca</a></span>
<br style="font-family:Calibri,Helvetica,sans-serif; font-size:16px">
<span style="font-family:Arial,Helvetica,sans-serif; font-size:10pt"><a href="https://www.facebook.com/4dlabs/" originalsrc="https://www.facebook.com/4dlabs/" shash="f4c6GwfgHzZUVoewKhZxuwk4vzgNNuo+9+iJvUlFzA9iZkEsx0SJCisdJELpw5pBBE+c3JTSGkT0lZkYwwzNzUIy5N8GiC/TyrSddlETK1kRt4byooz9oRst7F2yyl6neU15T8iHVH5k+ySlZgNRHUaURa0ubAa+jPLVmYYobTY=" class="x_OWAAutoLink" id="LPNoLP" tabindex="-1" disabled="true">Facebook</a> |
<a href="https://twitter.com/4D_LABS" originalsrc="https://twitter.com/4D_LABS" shash="fhayRJekzUAN//9b2+fXDWsNLwEJGdifw/F+ofYUz69p6+nkKNvI8faE/a9O3PSsfWlkLqvMA8jxf3PNw3VqFX2Zxm+BmHzslMqDh48YBOfRk9KaZLXcx8dTyuzamiInfI2NJxIExZh5N2zBnFexTyX1V3yPaNpAx5CNrCHEkAQ=" class="x_OWAAutoLink" id="LPNoLP" tabindex="-1" disabled="true">
Twitter</a> | <a href="https://www.linkedin.com/company/sfu-4d-labs/about/" originalsrc="https://www.linkedin.com/company/sfu-4d-labs/about/" shash="hxEl1L7l1uX2lryf4KsJDQV4vC5v53NEecy/xLkcPhEwSJivmfyxUDf0Edjl3IGM11qXkhGVCfIMxfEA5OCc79v/zNXPV2gTHXZnFB9v5ugTi+IDD+wQBsbCJ1S4anF0VrRaHMjTzqriSRlojCO74iHno5evGvblv+KDkBDfamk=" class="x_OWAAutoLink" id="LPNoLP" tabindex="-1" disabled="true">
LinkedIn</a> </span></span></p>
<p style="font-family:Arial,Helvetica,sans-serif; font-size:14px"></p>
<p style="font-family:Arial,Helvetica,sans-serif; font-size:14px"><img class="x_EmojiInsert" size="0" id="OWAPstImg82800" tabindex="-1" disabled="true" width="200" height="41" src="http://www.4dlabs.ca/content/dam/sfu/4dlabs/images/SFU_4DLabs_logo.png"></p>
<p><b>Reminder:</b> 4D LABS has a <a href="http://www.4dlabs.ca/about/acknowledging-4d-labs.html" originalsrc="http://www.4dlabs.ca/about/acknowledging-4d-labs.html" shash="OFUvcSmFHafv7WGXATHGzhpCC9RiYCrQ9yhCX6FDElUbyMxuHsAEKqFiTITNtSz3nlKVe7w3+wVV5cFeAEbYBOZ+r7OFDppTWfo8/yDApqFFm6oyaMnagl6XfvOfIjGspBhxcDdQPpHAPhdEhyURfkXdyAvqq1ec30Kh9C2wjvM=">
publication acknowledgement policy</a></p>
<p></p>
<a href="http://www.4dlabs.ca/about/acknowledging-4d-labs.html" originalsrc="http://www.4dlabs.ca/about/acknowledging-4d-labs.html" shash="OFUvcSmFHafv7WGXATHGzhpCC9RiYCrQ9yhCX6FDElUbyMxuHsAEKqFiTITNtSz3nlKVe7w3+wVV5cFeAEbYBOZ+r7OFDppTWfo8/yDApqFFm6oyaMnagl6XfvOfIjGspBhxcDdQPpHAPhdEhyURfkXdyAvqq1ec30Kh9C2wjvM="></a></div>
<a href="http://www.4dlabs.ca/about/acknowledging-4d-labs.html" originalsrc="http://www.4dlabs.ca/about/acknowledging-4d-labs.html" shash="OFUvcSmFHafv7WGXATHGzhpCC9RiYCrQ9yhCX6FDElUbyMxuHsAEKqFiTITNtSz3nlKVe7w3+wVV5cFeAEbYBOZ+r7OFDppTWfo8/yDApqFFm6oyaMnagl6XfvOfIjGspBhxcDdQPpHAPhdEhyURfkXdyAvqq1ec30Kh9C2wjvM="></a></div>
</div>
</div>
</body>
</html>