<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:ArialMT;
panose-1:0 0 0 0 0 0 0 0 0 0;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-ligatures:standardcontextual;
mso-fareast-language:EN-US;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0cm;
margin-right:0cm;
margin-bottom:0cm;
margin-left:36.0pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-ligatures:standardcontextual;
mso-fareast-language:EN-US;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:1569344366;
mso-list-type:hybrid;
mso-list-template-ids:-1076333482 134807567 134807577 134807579 134807567 134807577 134807579 134807567 134807577 134807579;}
@list l0:level1
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0cm;}
ul
{margin-bottom:0cm;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-GB" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Was fairly certain this topic has been covered before on labnetwork but couldn’t find anything relevant.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Many of our plasma etch tool users have to bond piece parts samples to silicon carrier wafers (150 or 200 mm diameter). To improve thermal conduction we use a bonding medium between the piece part samples and the silicon carrier wafer.
The challenge is ensuring there are no voids in this bonding layer but at the minute we have no way of imaging the stack to verify.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">My ever so brief search thus far has rendered one IR system:
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="https://www.idonus.com/downloads/idonus_brochure_WBI_2021-01-06.pdf">https://www.idonus.com/downloads/idonus_brochure_WBI_2021-01-06.pdf</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">It looks decent but stated minimum viewable feature size (1 pixel!!) is 200 um for a 200 mm diameter field of view.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Appreciate one could construct a home-made system but my preference is to go for the “easy” approach! There are also other techniques such as scanning acoustic microscopy and optical interferometry.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I guess my questions to the community are:<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<ol style="margin-top:0cm" start="1" type="1">
<li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1">What system(s) are you using to inspect bonded wafers/chips?<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1">What sort of resolutions do you have?<o:p></o:p></li></ol>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="mso-ligatures:none;mso-fareast-language:EN-GB">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="mso-ligatures:none;mso-fareast-language:EN-GB">James<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Dr. James Paul Grant</span><span style="mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-ligatures:none;mso-fareast-language:EN-GB">Research Engineer in Plasma Processing</span><span style="mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><b><i><span style="font-family:"Helvetica",sans-serif;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB">Plasma Processing Group</span></i></b><span style="mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto"><span style="font-family:"Helvetica",sans-serif;color:#003865;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="mailto:james.grant@glasgow.ac.uk"><span style="color:blue">james.grant@glasgow.ac.uk</span></a></span><span style="mso-ligatures:none;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:4.0pt"><span style="mso-ligatures:none;mso-fareast-language:EN-GB">
<img border="0" width="362" height="51" style="width:3.7708in;height:.5347in" id="Picture_x0020_1" src="cid:image001.png@01DA0CAB.7162C410"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:red;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB"><br>
</span><span style="mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_2" src="cid:image002.png@01DA0CAB.7162C410"></span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="LinkedIn.com/company/JWNC"><span style="color:#005C8A">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB"><br>
</span><span style="mso-fareast-language:EN-GB"><img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_3" src="cid:image003.png@01DA0CAB.7162C410"></span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#EC2129;mso-ligatures:none;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:"ArialMT",serif;color:#005C8A;mso-ligatures:none;mso-fareast-language:EN-GB"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A">@UofG_JWNC</span></a></span><o:p></o:p></p>
</div>
</body>
</html>