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<p class="MsoNormal">Hi,<o:p></o:p></p>
<p class="MsoNormal">It’s a Lam Autoetch 490 plasma etch (because of Chlorine)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal">Bob<o:p></o:p></p>
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<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">-----------------------------------------------------------------<o:p></o:p></span></p>
<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">Robert J. Bicchieri<o:p></o:p></span></p>
<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">Research Specialist<o:p></o:p></span></p>
<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">Massachusetts Institute of Technology<o:p></o:p></span></p>
<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">MIT. Nano<o:p></o:p></span></p>
<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">60 Vassar St. Bldg. 12-5007<o:p></o:p></span></p>
<p class="MsoAutoSig"><span style="font-size:9.0pt;color:navy">Cambridge, MA 02139<o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Craig Cheney<br>
<b>Sent:</b> Wednesday, November 8, 2023 11:23 AM<br>
<b>To:</b> Jim Mitchell <jimm@science.xyz>; Lab Network (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Name that tool<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Lam Research 580/590 plasma etch tool. Spent many years working on them many many years ago.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:20.0pt;font-family:"Impact",sans-serif">Craig Cheney<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt">Owner, President<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F3864"><img width="165" height="55" style="width:1.7166in;height:.575in" id="Picture_x0020_2" src="cid:image001.jpg@01DA124B.085B0180" alt="A picture containing text, clipart
Description automatically generated"></span><o:p></o:p></p>
<p class="MsoNormal">2030 Pinehurst Drive<o:p></o:p></p>
<p class="MsoNormal">Middleton, WI 53562<o:p></o:p></p>
<p class="MsoNormal">P: 608.834.4200<o:p></o:p></p>
<p class="MsoNormal">C: 608.438.8714<o:p></o:p></p>
<p class="MsoNormal">F: 608.834.4299<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black;background:white">Aviation in itself is not inherently dangerous. But to an even greater degree than the sea, it is terribly unforgiving of any carelessness, incapacity, or neglect. - Captain A.
G. Lamplugh </span><span style="font-size:12.0pt;background:white"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:12.0pt;background:white"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:12.0pt;color:black;background:white">This</span></b><b><span style="font-size:12.0pt"> e-mail transmission and any attachments to it are intended solely for the use of the individual or entity to whom it is addressed
and may contain confidential and privileged information. If you are not the intended recipient, your use, forwarding, printing, storing, disseminating, distribution, or copying of this communication is prohibited. If you received this communication in error,
please notify the sender immediately by replying to this message and delete it from your computer.</span></b><span style="font-size:12.0pt;background:white"><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Jim Mitchell<br>
<b>Sent:</b> Wednesday, November 8, 2023 5:41 AM<br>
<b>To:</b> Lab Network (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Name that tool<o:p></o:p></p>
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<p class="MsoNormal"><span class="gmailsignatureprefix">-- </span><o:p></o:p></p>
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<p class="MsoNormal"><b><i><span style="font-family:"Tahoma",sans-serif;color:#8E7CC3">Jim Mitchell </span></i></b><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Tahoma",sans-serif;color:#8E7CC3">Science Wafer Services</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Tahoma",sans-serif;color:#8E7CC3"><a href="mailto:Jimm@science.xyz" target="_blank">Jimm@science.xyz</a> <i><a href="mailto:Jimm@corporationscience.com" target="_blank">Jimm@corporationscience.com</a></i></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Tahoma",sans-serif;color:#8E7CC3">(919) 717-7325</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Tahoma",sans-serif;color:#8E7CC3">Science Corporation</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Tahoma",sans-serif;color:#8E7CC3">3021 E Cornwallis Rd, Durham, NC 27709 </span><o:p></o:p></p>
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