<div dir="ltr"><div class="gmail_default" style="font-family:arial,sans-serif">Kevin,</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">We have an assortment of both Air Products (AP), and Applied Energy Systems (AES) gas cabinets, mini gas cabinets, and valve manifold boxes. Orur AP cabinets are nearing their end of life for the automatic controls, and our intent when they expire is to replace them with controls and panels from AES.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Make sure that whatever you purchase, you can "talk" to it with external equipment.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">I've personally worked with AES for over 25 years, both at the University, and on the outside. You won't find a better company to work with.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">If you want to take a look at a variety of different hardware, and installations, you're more than welcome to come up for a visit.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div>Dennis<span class="gmail_default" style="font-family:arial,sans-serif"> Schweiger</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">University of Michigan/LNF</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Facilities Manager</span></div><div> </div><div>734.647.2055 Ofc<br></div></div></div><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Nov 22, 2023 at 8:12 AM Kevin M McPeak <<a href="mailto:kmcpeak@lsu.edu">kmcpeak@lsu.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">Dear Colleagues,<br>
<br>
The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.<br>
<br>
So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.<br>
<br>
Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!<br>
<br>
Regards,<br>
Kevin<br>
<br>
--<br>
Kevin M. McPeak<br>
Associate Professor | LSU Dept. of Chemical Engineering<br>
225-578-0058 | <a href="http://mcpeaklab.com" rel="noreferrer" target="_blank">mcpeaklab.com</a> | <a href="http://lsu.edu/nanofabrication" rel="noreferrer" target="_blank">lsu.edu/nanofabrication</a><br>
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