<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Verdana;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.25in 1.0in 1.25in;}
div.WordSection1
{page:WordSection1;}
--></style>
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal">Hi Christophe,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regarding your second question. Our lab has the LN2-chiller switchover capabilities on both of our 10+ year old Oxford Plasmalab 100 DRIE systems.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">In practice we have used the chillers 99+% of the time and only switched over to LN2 on rare occasions. We have not observed any reliability issues with the changeover hardware or process, but it is seldom exercised. If I recall correctly,
the changeover takes about 45 minutes and it’s a process that might require service level permissions. In any case we have it locked out of the user accounts on our tools. Some of these observations may be different from how this is handled on a modern Oxford
ICP-RIE though since the PLCs and software have undergone many changes since our systems were commissioned.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hope this helps,<o:p></o:p></p>
<p class="MsoNormal"> -Nathan<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">-- <o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">Nathan Nelson-Fitzpatrick PhD, PEng (He/Him)</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">Director, Quantum-Nano Fabrication and Characterization Facility (QNFCF)</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">Office of Research</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">University of Waterloo</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">200 University Avenue West, Waterloo, ON N2L 3G1</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">P: 519-888-4567 ext. 31796</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black">C: 226-218-3206</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><a href="https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif">https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/</span></a><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><img border="0" width="271" height="104" style="width:2.8229in;height:1.0833in" id="Picture_x0020_1" src="cid:image001.png@01DA1D24.763E1820" alt="signature_3157769220"></span><o:p></o:p></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div id="mail-editor-reference-message-container">
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span lang="FR-CA" style="font-size:12.0pt;color:black">From:
</span></b><span lang="FR-CA" style="font-size:12.0pt;color:black">labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Christophe Clément <christophe.clement@polymtl.ca><br>
<b>Date: </b>Tuesday, November 21, 2023 at 4:13 PM<br>
<b>To: </b>labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>[labnetwork] ICP-RIE Purchase<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span lang="EN-CA">Hello community, </span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"> </span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I need your input regarding the purchase of a new ICP-RIE. We currently have two Oxford systems, Plasmalab System100. We're quite happy with them (the service could be better though), so we've asked Oxford to quote us
for an ICP-RIE, the Cobra model. This system will be dedicated for Silicon Bosch process only.</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">However, we wouldn't want to miss out on other tools that might satisfy us. Apart from Plasma Therm, whom I intend to contact shortly, do you know of any other suppliers of this type of equipment? As our cleanroom space
is limited, equipment the size of a Plasmalab would be ideal.</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"> </span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Also, regarding wafer cooling, we currently use liquid nitrogen only, although we haven't been doing cryo processes for a long time, but we don't want to eliminate this option at this time for the new tool. I've been
proposed to use a chiller and LN2 combo, to save LN2 when not using cryo processes.</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I'd be interested to hear what you think of this choice (cooling time, maintenance…)</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"> </span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">Thank you<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">Best<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">Christophe<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA"> <o:p></o:p></span></p>
<p class="MsoNormal"><b><i><span lang="FR-CA" style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:FR-CA">Christophe Clément</span></i></b><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="FR-CA" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Technicien laboratoire</span></b><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Laboratoire de microfabrication (LMF)</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Groupe des Couches Minces (GCM)
</span><a href="http://www.gcmlab.ca/" target="_blank"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;mso-fareast-language:FR-CA">www.gcmlab.ca</span></a><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Ecole Polytechnique de Montréal
</span><a href="http://www.polymtl.ca/" target="_blank"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">www.polymtl.ca</span></a><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Département de génie physique
</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA">*</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">2900 Boulevard Edouard Monpetit</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA"><br>
</span><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA">8</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA">
</span><a href="mailto:christophe.clement@polymtl.ca" target="_blank"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue;mso-fareast-language:FR-CA">christophe.clement@polymtl.ca</span></a><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA">(</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">514 340 4711 #2417</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Fax : 514 340 5195</span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="mso-fareast-language:FR-CA"> </span><span lang="FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="mso-fareast-language:FR-CA"> </span><span lang="FR-CA"><o:p></o:p></span></p>
</div>
</div>
</div>
</body>
</html>