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<p class="MsoNormal">Christophe,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have had nothing but issues with Trion for RIEs, and these issues are not limited to my facility. I would avoid them.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal">Jeff<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Jeff Salzmann<o:p></o:p></p>
<p class="MsoNormal">Assistant Professor of Research<o:p></o:p></p>
<p class="MsoNormal">Cleanroom Manager, Shared Instrumentation Laboratories<o:p></o:p></p>
<p class="MsoNormal">School of Engineering and Applied Sciences<o:p></o:p></p>
<p class="MsoNormal">University at Buffalo<o:p></o:p></p>
<p class="MsoNormal">114A Davis Hall<o:p></o:p></p>
<p class="MsoNormal">Buffalo, NY 14260<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Christophe Clément<br>
<b>Sent:</b> Tuesday, November 21, 2023 2:26 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] ICP-RIE Purchase<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-CA">Hello community, <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I need your input regarding the purchase of a new ICP-RIE. We currently have two Oxford systems, Plasmalab System100. We're quite happy with them (the service could be better though), so we've asked Oxford to quote us
for an ICP-RIE, the Cobra model. This system will be dedicated for Silicon Bosch process only.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">However, we wouldn't want to miss out on other tools that might satisfy us. Apart from Plasma Therm, whom I intend to contact shortly, do you know of any other suppliers of this type of equipment? As our cleanroom space
is limited, equipment the size of a Plasmalab would be ideal.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Also, regarding wafer cooling, we currently use liquid nitrogen only, although we haven't been doing cryo processes for a long time, but we don't want to eliminate this option at this time for the new tool. I've been
proposed to use a chiller and LN2 combo, to save LN2 when not using cryo processes.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I'd be interested to hear what you think of this choice (cooling time, maintenance…)<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">Thank you<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">Best<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA">Christophe<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><i><span lang="FR-CA" style="font-size:12.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:FR-CA">Christophe Clément</span></i></b><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="FR-CA" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Technicien laboratoire</span></b><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Laboratoire de microfabrication (LMF)</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Groupe des Couches Minces (GCM)
<u><a href="http://www.gcmlab.ca/" target="_blank">www.gcmlab.ca</a></u></span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Ecole Polytechnique de Montréal
</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><a href="http://www.polymtl.ca/" target="_blank"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray">www.polymtl.ca</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Département de génie physique
</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA">*</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">2900 Boulevard Edouard Monpetit</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA"><br>
</span><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA">8</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA">
</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><a href="mailto:christophe.clement@polymtl.ca" target="_blank"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue">christophe.clement@polymtl.ca</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:10.0pt;font-family:Wingdings;color:#1F497D;mso-fareast-language:FR-CA">(</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333;mso-fareast-language:FR-CA">
</span><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">514 340 4711 #2417</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="font-size:8.0pt;font-family:"Arial",sans-serif;color:gray;mso-fareast-language:FR-CA">Fax : 514 340 5195</span><span lang="FR-CA" style="mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="mso-fareast-language:FR-CA"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR-CA" style="mso-fareast-language:FR-CA"> </span><span lang="FR-CA"><o:p></o:p></span></p>
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