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<p class="MsoNormal">Hello labnetwork,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have an ALD chamber of approximately 0.2 m3 (0.6 x 0.6 x 0.6 m) and we have been transferring recipe from a much smaller chamber.<o:p></o:p></p>
<p class="MsoNormal">However, it is challenging to get a good sequential infiltration synthesis (SIS).<o:p></o:p></p>
<p class="MsoNormal">What have been the main roadblock when scaling up ALD chamber size to replicate recipe? Gas flow, pulse duration, pumping time, temperature?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span lang="FR" style="mso-ligatures:standardcontextual;mso-fareast-language:EN-CA">Best regards, Bien cordialement,</span><span lang="FR" style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="mso-ligatures:standardcontextual;mso-fareast-language:EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="mso-fareast-language:EN-CA">Fabien Dauzou, Dipl. Ing.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-CA">Manager Processes at Edgehog<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-CA">Photovoltaic Enthusiast | Cleantech Optimist<o:p></o:p></span></p>
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|Mob: 438-868-1657 | </span><span style="font-size:8.0pt;mso-fareast-language:EN-CA"><a href="https://www.edgehogtech.com/"><span lang="EN-US" style="color:blue">https://www.edgehogtech.com/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:8.0pt;color:#00B050;mso-fareast-language:EN-CA">Think green, before printing this email.</span><span lang="EN-US" style="font-size:8.0pt;color:#00B050;mso-fareast-language:EN-CA"><o:p></o:p></span></p>
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