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Welcome Russ!<br>
<br>
As some of our colleagues have/will mentioned/mention, it is best to
work with your local folks such as EHS, fire marshal, and city code
enforcers. At times you may have to educate them on certain topics.
Gathering input from other places across the country as you are
doing should be very helpful in your conversations.<br>
<br>
At Delaware I have gas room for corrosives (placed in gas cabinets)
and an inerts "farm". I also have a bunker that houses pyrophorics
and flammables (also placed in gas cabinets). The BCl3 cabinet is
located in the chase close to the tools that need it (there are very
clever folks on this mailing list who know how to flow things like
BCl3 across hundreds of feet). All corrosives, flammables, and
toxics are transported to the tools via coaxial lines. I also have a
toxic gas monitoring system with various levels of integration with
the tools, the fire alarm system, and the the building management
system.<br>
<br>
The gas equipment provided by Applied Energy Systems seems to be
very popular with the university cleanrooms and with good reason;
I've been happy with their products for the past 16 years.<br>
<br>
Abatement of fluorinated gases seems to also be a local code item
and I do not have to abate them here.<br>
<br>
Good luck!<br>
<br>
Iulian<br>
<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 12/4/2023 1:51 AM, Russell Renzas
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:SN6PR0102MB3421319E2E408FFEE586CC00AA86A@SN6PR0102MB3421.prod.exchangelabs.com">
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<div dir="ltr">
<div dir="ltr">Hi, I'm Russ, some of you know me from Oxford
Instruments - I just left to direct a new 3k sqft academic fab
at University of Nevada Reno. </div>
<div dir="ltr"><br>
</div>
<div dir="ltr">How do the smaller university fabs handle toxic
gas delivery? e.g. Cl2, BCl3, H2... Any recommendations for
systems/vendors? And do you generally keep cylinders for that
in an external bunker-type place, or nearer point of use (in a
service chase)? SF6 and the like don't need anything special,
correct?</div>
<div id="ms-outlook-mobile-signature">
<div><br>
</div>
<div dir="ltr">Also is it now typical to abate fluorinated
etch gases which I thought requires expensive burn boxes, or
do the dry bed systems suffice? </div>
<div dir="ltr"><br>
</div>
<div dir="ltr">Bit embarrassed that I don't know this stuff
better, but I never had to think about it before. </div>
<div dir="ltr"><br>
</div>
<div dir="ltr">Happy holidays,</div>
<div dir="ltr"><br>
</div>
<div dir="ltr">Russ</div>
<div dir="ltr"><br>
</div>
<div dir="ltr">
<div dir="ltr">Russ Renzas</div>
<div dir="ltr">University of Nevada, Reno</div>
<div dir="ltr"><a
href="https://scholar.google.com/citations?user=_4TTYQoAAAAJ&hl=en"
moz-do-not-send="true">Google Scholar</a>, <a
href="https://www.linkedin.com/in/renzas"
moz-do-not-send="true">LinkedIn</a></div>
<div dir="ltr"><br>
</div>
<div dir="ltr">— My position at UNR starts in mid-January
2024. —</div>
</div>
</div>
</div>
<br>
<fieldset class="moz-mime-attachment-header"></fieldset>
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</pre>
</blockquote>
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