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<div dir="ltr">Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to direct a new 3k sqft academic fab at University of Nevada Reno. </div>
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<div dir="ltr">How do the smaller university fabs handle toxic gas delivery? e.g. Cl2, BCl3, H2... Any recommendations for systems/vendors? And do you generally keep cylinders for that in an external bunker-type place, or nearer point of use (in a service chase)?
SF6 and the like don't need anything special, correct?</div>
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<div dir="ltr">Also is it now typical to abate fluorinated etch gases which I thought requires expensive burn boxes, or do the dry bed systems suffice? </div>
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<div dir="ltr">Bit embarrassed that I don't know this stuff better, but I never had to think about it before. </div>
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<div dir="ltr">Happy holidays,</div>
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<div dir="ltr">Russ</div>
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<div dir="ltr">Russ Renzas</div>
<div dir="ltr">University of Nevada, Reno</div>
<div dir="ltr"><a href="https://scholar.google.com/citations?user=_4TTYQoAAAAJ&hl=en">Google Scholar</a>,
<a href="https://www.linkedin.com/in/renzas">LinkedIn</a></div>
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<div dir="ltr">— My position at UNR starts in mid-January 2024. —</div>
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