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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">Hi Fabien,</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">So, a thing to remember is that ALD in its pure form is putting monolayers of reactant on a surface. The monolayer formed is somewhat independent of vapor pressure, flow
and other "cvd" variables, and often only mildly dependent on temperature, depending what the reactants are.</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">In sequential infiltration synthesis, you are depending on the
<i>diffusion</i> of precursor <i>into</i> a substrate to change the substrate somehow. As soon as you say "diffusion", now you have a process very much influenced by "cvd" variables such as partial pressure, total pressure, temperature, exposed area, flow
variations, etc. Thus, upscaling an ALD process for SIS purposes is a rather more complicated kettle of fish compared to upscaling a "typical" ALD process.</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">I assume you are using a bigger chamber to put more substrates in? Or perhaps a larger individual substrate? What do you reckon is the % change in substrate surface area
and "infiltration volume" between old and new chamber?</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">What is the chemistry that you are using?</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">We can discuss this more off-line, if folks feel it is too much into the weeds for a general labnetwork discussion...</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">Mac Hathaway</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">ALD Process Engineer</span></div>
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<span style="font-family: Aptos Serif, Aptos_EmbeddedFont, Aptos_MSFontService, serif;">Harvard CNS</span></div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Fabien Dauzou <fabien.dauzou@edgehogtech.com><br>
<b>Sent:</b> Monday, December 4, 2023 2:26 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Size GEN 2 ALD transfer recipe roadblock</font>
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<p class="x_MsoNormal">Hello labnetwork,</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">We have an ALD chamber of approximately 0.2 m3 (0.6 x 0.6 x 0.6 m) and we have been transferring recipe from a much smaller chamber.</p>
<p class="x_MsoNormal">However, it is challenging to get a good sequential infiltration synthesis (SIS).</p>
<p class="x_MsoNormal">What have been the main roadblock when scaling up ALD chamber size to replicate recipe? Gas flow, pulse duration, pumping time, temperature?</p>
<p class="x_MsoNormal"> </p>
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<p class="x_MsoNormal"><span lang="FR" style="">Best regards, Bien cordialement,</span><span lang="FR" style=""></span></p>
<p class="x_MsoNormal"><span lang="FR" style=""> </span></p>
<p class="x_MsoNormal"><span lang="FR" style="">Fabien Dauzou, Dipl. Ing.</span></p>
<p class="x_MsoNormal"><span lang="EN-US" style="">Manager Processes at Edgehog</span></p>
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</span><span style="font-size:8.0pt"><a href="https://www.edgehogtech.com/"><span lang="EN-US" style="color:blue">https://www.edgehogtech.com/</span></a></span></p>
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