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Hello Sushma,<br>
<br>
I am not sure what procedure the company has for cleaning the RTA
quartz, but we clean our RTA quartz with a buffered HF solution
(standard 6:1 BOE). We have a different RTA (Solaris150) but it has
a quartz chamber. Basically etch everything back to clean quartz.
We do get residue on our quartz from time to time and the etching
works great, returning the process back into spec.<br>
<br>
Of course follow all safety regulations, proper PPE, and use best
hood practices when working with HF.<br>
<br>
Best Regards,<br>
Brent<br>
-- <br>
Brent P. Gila, PhD.<br>
Associate Director, Research Service Centers<br>
University of Florida<br>
1041 Center Drive<br>
Gainesville, Florida 32611<br>
<a class="moz-txt-link-freetext" href="Tel:352-273-2245">Tel:352-273-2245</a>, Fax:352-846-2877<br>
email: <a class="moz-txt-link-abbreviated" href="mailto:bgila@ufl.edu">bgila@ufl.edu</a><br>
<br>
<div class="moz-cite-prefix">On 1/26/2024 1:13 PM, Sushma Kotru
wrote:<br>
</div>
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<div><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616"><b>[External
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<p class="MsoNormal">Hello everyone,<o:p></o:p></p>
<p class="MsoNormal"><span style="color:#323130;background:white">Sorry, this is
going to be long e-mail.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#323130;background:white"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#323130;background:white">We have an RTA,
JetFirst 100/150 from Jiplec (yes, it is old but was
working fine). We use it mostly for annealing PZT/PLZT
films around 750 C. We started noticing some changes to
the quartz window (picture attached) and the films are
damaged after annealing and develop a white layer on the
surface. These films don’t show any ferroelectric
properties after annealing in RTA furnace.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#323130;background:white">At this point we
are kind of stuck as we cannot make progress on the
research projects without annealing the films. We have
contacted the company and they suspect that the quartz
window is creating the issue. We have cleaned the quartz
window using the procedure the company provided but the
problem still exists. The company is suggested to replace
quartz window ( with additional parts) and buy a special
sample holder (~30K)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#323130;background:white">My questions are:<o:p></o:p></span></p>
<ol style="margin-top:0in" type="1" start="1">
<li class="MsoListParagraphCxSpFirst" style="color:#323130;margin-left:0in;mso-add-space:auto;mso-list:l0 level1 lfo1">
<span style="background:white">Does anyone have RTA from
this company? If so, can you provide your contact so
that we can connect off line?<o:p></o:p></span></li>
<li class="MsoListParagraphCxSpMiddle" style="color:#323130;margin-left:0in;mso-add-space:auto;mso-list:l0 level1 lfo1">
<span style="background:white">Those who use similar RTA
furnaces, have you faced similar issues?<o:p></o:p></span></li>
<li class="MsoListParagraphCxSpMiddle" style="color:#323130;margin-left:0in;mso-add-space:auto;mso-list:l0 level1 lfo1">
<span style="background:white">I am not positive if the
issue is with the RTA or with the samples. When we
anneal other samples (magnetic- eg. Ni ferrite etc.), we
have no issues with those samples. Anyone who has a RTA
furnace- would you be willing to help us by annealing a
couple of samples for us?<o:p></o:p></span></li>
<li class="MsoListParagraphCxSpLast" style="color:#323130;margin-left:0in;mso-add-space:auto;mso-list:l0 level1 lfo1">
<span style="background:white">At this point, I don’t have
the money to buy the components but before I even start
looking for resources, I want to make sure the problem
is RTA and not the process itself (graduate student is
using process established by previous graduate students
but not getting results).<o:p></o:p></span></li>
</ol>
<p class="MsoNormal"><span style="color:#323130;background:white">Any
help/suggestions/comments would be highly appreciated.<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Sushma<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="background:white"><b><span style="color:#990000">Sushma Kotru</span></b><span style="color:black"> <o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:#51575B">Associate
Professor<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:#51575B">Senior
Member IEEE<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:black">Department
of Electrical & Computer Engineering
<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:black">Materials
Science PhD Program<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:black"><a href="https://www.ua.edu/" originalsrc="https://www.ua.edu/" shash="b9lzt0ZUr4ls08KKQlKTvkmZI4Xtnxref3pCz5OwOpWu51KYkIki6iaOmpCN/JAAoz3AEfEqGpsZ5ZYT72OLgSBGo/2UfUHXt4dOH/pTKzFZnCY+yqqqpXaqCAUHi/CSQ5yacwqPc0gNCpzR/fJrPVunLfeaRJI7+GYeuN1DsxY=" moz-do-not-send="true"><span style="color:maroon">The
University of Alabama</span></a><br>
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Phone <a href="tel:205-348-7235" moz-do-not-send="true"><span style="color:black">205-348-7235</span></a><br>
<a href="mailto:skotru@eng.ua.edu" moz-do-not-send="true"><span style="color:black">skotru@eng.ua.edu</span></a><o:p></o:p></span></p>
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