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Sushma,</div>
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I'm assuming you're operating in Pyrometer mode at that temperature, you'll definitely have issues with without a very clean quartz window both above and in the pipeline window between the pyrometer and backside of the carrier wafer. As Brent said we typically
do an acid clean on the large upper window. I use HF/Nitric Acid/UPW. The tiny lower window is likely BaF2 and any material that falls down the center pipeline onto this window can cause temperature response inaccuracy. I wouldn't use anything other than air
to clean this small window.</div>
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If you're running with a TC at that temperature, it's probably breaking down and causing material to deposit on the various surfaces. You'll need to run a recalibration after everything is cleaned back up, the procedure is in the user manual and it takes some
iteration to get a consistent result across your whole pyrometer range (500-1100C for us).</div>
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Rich</div>
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<div dir="ltr" id="divRplyFwdMsg"><span style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(0, 0, 0);"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Gila,Brent P <bgila@ufl.edu><br>
<b>Sent:</b> Friday, January 26, 2024 3:50 PM<br>
<b>To:</b> Sushma Kotru <skotru@eng.ua.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] RTA furnace issues</span>
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<div style="text-align: left;"><span style="font-family: Verdana; font-size: 10pt; color: rgb(0, 0, 0);">----
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<div>Hello Sushma,<br>
<br>
I am not sure what procedure the company has for cleaning the RTA quartz, but we clean our RTA quartz with a buffered HF solution (standard 6:1 BOE). We have a different RTA (Solaris150) but it has a quartz chamber. Basically etch everything back to clean
quartz. We do get residue on our quartz from time to time and the etching works great, returning the process back into spec.<br>
<br>
Of course follow all safety regulations, proper PPE, and use best hood practices when working with HF.<br>
<br>
Best Regards,<br>
Brent<br>
--<br>
Brent P. Gila, PhD.<br>
Associate Director, Research Service Centers<br>
University of Florida<br>
1041 Center Drive<br>
Gainesville, Florida 32611<br>
<a href="Tel:352-273-2245" id="OWA01017cc1-9b15-a9ec-1ef2-03ff7b5151a9" class="x_moz-txt-link-freetext OWAAutoLink" data-auth="NotApplicable" data-loopstyle="linkonly">Tel:352-273-2245</a>, Fax:352-846-2877<br>
email: <a href="mailto:bgila@ufl.edu" id="OWAaa99b388-f9be-c7f4-c29d-45dfb1dca624" class="x_moz-txt-link-abbreviated OWAAutoLink" data-loopstyle="linkonly">
bgila@ufl.edu</a><br>
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<div>On 1/26/2024 1:13 PM, Sushma Kotru wrote:</div>
<blockquote>
<div><span style="font-family: Arial, sans-serif; font-size: 9pt; color: rgb(250, 70, 22);"><b>[External Email]</b></span></div>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
Hello everyone,</p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(50, 49, 48); background-color: white;">Sorry, this is going to be long e-mail.</span></p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(50, 49, 48); background-color: white;"> </span></p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(50, 49, 48); background-color: white;">We have an RTA, JetFirst 100/150 from Jiplec (yes, it is old but was working fine). We use it mostly for annealing PZT/PLZT films around 750 C. We started noticing some changes to the quartz window
(picture attached) and the films are damaged after annealing and develop a white layer on the surface. These films don’t show any ferroelectric properties after annealing in RTA furnace.</span></p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(50, 49, 48); background-color: white;">At this point we are kind of stuck as we cannot make progress on the research projects without annealing the films. We have contacted the company and they suspect that the quartz window is creating
the issue. We have cleaned the quartz window using the procedure the company provided but the problem still exists. The company is suggested to replace quartz window ( with additional parts) and buy a special sample holder (~30K)</span></p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(50, 49, 48); background-color: white;">My questions are:</span></p>
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<li style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); line-height: 106%; margin: 0in 0in 0.0001pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); background-color: white;">Does anyone have RTA from this company? If so, can you provide your contact so that we can connect off line?</span></li><li style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); line-height: 106%; margin: 0in 0in 0.0001pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); background-color: white;">Those who use similar RTA furnaces, have you faced similar issues?</span></li><li style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); line-height: 106%; margin: 0in 0in 0.0001pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); background-color: white;">I am not positive if the issue is with the RTA or with the samples. When we anneal other samples (magnetic- eg. Ni ferrite etc.), we have no issues
with those samples. Anyone who has a RTA furnace- would you be willing to help us by annealing a couple of samples for us?</span></li><li style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); line-height: 106%; margin: 0in 0in 8pt;">
<span style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(50, 49, 48); background-color: white;">At this point, I don’t have the money to buy the components but before I even start looking for resources, I want to make sure the problem is
RTA and not the process itself (graduate student is using process established by previous graduate students but not getting results).</span></li></ol>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(50, 49, 48); background-color: white;">Any help/suggestions/comments would be highly appreciated.</span></p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
</p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
Thanks,</p>
<p style="margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
Sushma</p>
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</p>
<p style="background-color: white; margin: 0in 0in 0.0001pt; font-family: Calibri, sans-serif; font-size: 11pt;">
<span style="color: rgb(153, 0, 0);"><b>Sushma Kotru</b></span><span style="color: black;"> </span></p>
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