<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:wf_segoe-ui_normal;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
line-height:105%;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
span.EmailStyle21
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Roman,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I’ve used Massvac a few times and I’ve been quite happy with their work. You might want to have them send you a shipping box.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal">Jeff<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="line-height:normal">Jeff Salzmann<o:p></o:p></p>
<p class="MsoNormal" style="line-height:normal">Assistant Professor of Research<o:p></o:p></p>
<p class="MsoNormal" style="line-height:normal">Cleanroom Manager, Shared Instrumentation Laboratories<o:p></o:p></p>
<p class="MsoNormal" style="line-height:normal">School of Engineering and Applied Sciences<o:p></o:p></p>
<p class="MsoNormal" style="line-height:normal">University at Buffalo<o:p></o:p></p>
<p class="MsoNormal" style="line-height:normal">114A Davis Hall<o:p></o:p></p>
<p class="MsoNormal" style="line-height:normal">Buffalo, NY 14260<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal" style="line-height:normal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Roman Akhmechet<br>
<b>Sent:</b> Monday, February 5, 2024 9:08 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Turbo pump PlasmaTherm 720 etcher<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" align="left" width="100%" style="width:100.0%">
<tbody>
<tr>
<td style="background:#A6A6A6;padding:5.25pt 1.5pt 5.25pt 1.5pt"></td>
<td width="100%" style="width:100.0%;background:#EAEAEA;padding:5.25pt 3.75pt 5.25pt 11.25pt">
<div>
<p class="MsoNormal" style="line-height:normal;mso-element:frame;mso-element-frame-hspace:2.25pt;mso-element-wrap:around;mso-element-anchor-vertical:paragraph;mso-element-anchor-horizontal:column;mso-height-rule:exactly">
<span style="font-size:9.0pt;font-family:wf_segoe-ui_normal;color:#212121">You don't often get email from
<a href="mailto:romana@princeton.edu">romana@princeton.edu</a>. <a href="https://aka.ms/LearnAboutSenderIdentification">
Learn why this is important</a><o:p></o:p></span></p>
</div>
</td>
<td width="75" style="width:56.25pt;background:#EAEAEA;padding:5.25pt 3.75pt 5.25pt 3.75pt;align:left">
</td>
</tr>
</tbody>
</table>
<div>
<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal">Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into
failure, probably due to a time out. I’m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Roman Akhmechet<o:p></o:p></p>
<p class="MsoNormal">Princeton University <o:p></o:p></p>
</div>
</div>
</body>
</html>