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<p class="MsoNormal">Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Our facility has a Frontier Semiconductor FSM 500 TC that we recently got working again. We would like to run some calibrations, but we lack any of the manuals or documentation for this tool. Does anybody happen to have a copy of the manual
and/or service manual for this tool? Thank you in advance for your support.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best Regards,<o:p></o:p></p>
<p class="MsoNormal">Will <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">Will Hyland</span></b><b><span style="mso-ligatures:none"><o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">Associate Process & Equipment Engineer</span></b><b><span style="mso-ligatures:none"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:maroon;background:white;mso-ligatures:none">Pritzker Nanofabrication Facility</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">The
</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">University of Chicago<br>
<span style="background:white">Eckhardt Research Center</span><br>
<span style="background:white">5640 S. Ellis Ave., </span>Room LL180 </span><span style="mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">Chicago, IL 60637 <o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-ligatures:none"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none">773.834.4978
</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">office<br>
<br>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;background:white;mso-ligatures:none"><a href="mailto:whyland@uchicago.edu">whyland@uchicago.edu</a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#00B0F0;mso-ligatures:none">
</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none">|</span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#00B0F0;mso-ligatures:none">
</span><span style="mso-ligatures:none"><a href="http://pme.uchicago.edu/"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;background:white">pme.uchicago.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:none"> </span><span style="mso-ligatures:none"><o:p></o:p></span></p>
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