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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Arial",sans-serif;
color:#0070C0;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
mso-ligatures:none;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 90.0pt 72.0pt 90.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Hi Mario,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">I don’t know about “the best”, but in our RTA, we use 5% H2 and 95% N2. I think it’s pretty standard.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Anyway, nobody complained yet
</span><span lang="en-IL" style="font-family:"Segoe UI Emoji",sans-serif;color:#0070C0;mso-fareast-language:EN-US">😊</span><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US">Golan.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="en-IL" style="font-family:"Arial",sans-serif;color:#0070C0;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><img width="81" height="90" style="width:.8437in;height:.9375in" id="Picture_x0020_3" src="cid:image001.jpg@01DA6B1C.4FF280C0"><span style="mso-ligatures:standardcontextual"><o:p></o:p></span></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Golan A. Tanami, PhD</span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">
<b>| </b>Head of the Unit for Nanofabrication (UNF)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="HE" dir="RTL" style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Center for Nanoscience and Nanotechnology<span lang="HE" dir="RTL"><o:p></o:p></span></span></b></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;mso-ligatures:standardcontextual">Edmond J. Safra Campus<span lang="HE" dir="RTL"><br>
</span>The Hebrew University of Jerusalem<span lang="HE" dir="RTL"><br>
</span>T +972.2.6584179 | M +972.50.9891111</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#0070C0;mso-ligatures:standardcontextual"><br>
</span><span dir="RTL"><a href="mailto:golant@savion.huji.ac.il"><span lang="EN-US" dir="LTR" style="color:blue;mso-ligatures:standardcontextual">golant</span><span lang="EN-US" dir="LTR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:blue;mso-ligatures:standardcontextual">@savion.huji.ac.il</span></a></span><span style="color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:standardcontextual">follow us on</span><span style="color:#0070C0;mso-ligatures:standardcontextual">
</span><a href="https://www.facebook.com/hujinanocenter/"><span style="color:blue;mso-ligatures:standardcontextual">Facebook</span></a><span style="color:#1F497D;mso-ligatures:standardcontextual">
</span><span style="color:black;mso-ligatures:standardcontextual">@hujinanocenter</span><span style="color:#1F497D;mso-ligatures:standardcontextual"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Beaudoin, Mario<br>
<b>Sent:</b> Tuesday, February 27, 2024 10:27 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Forming gas: 5% or 10% hydrogen<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="en-IL"><o:p> </o:p></span></p>
<p><span lang="en-IL">Dear Network,<o:p></o:p></span></p>
<p><span lang="en-IL">We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing?<o:p></o:p></span></p>
<p><span lang="en-IL">Regards,<o:p></o:p></span></p>
<p><span lang="en-IL">Mario<o:p></o:p></span></p>
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