<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body style="overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">Hi Mario, <div><br></div><div>We also use 5% H2 in N2 as our forming gas on RTP system. </div><div><br></div><div><br></div><div>Jing<br><div>
<div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div dir="auto" style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">---------------------------------------</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">Jing Guo Ph.D.</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">Research Scientist</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">SEA Cleanroom (SST 017)</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">Rice University</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">Houston, TX </div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">jeanne.guo@rice.edu</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;">713-348-8227</div><div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><br></div><br class="Apple-interchange-newline"></div></div><br class="Apple-interchange-newline"></div><br class="Apple-interchange-newline"></div><br class="Apple-interchange-newline"><br class="Apple-interchange-newline">
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<div><br><blockquote type="cite"><div>On Feb 29, 2024, at 6:35 AM, Golan Tanami <golant@savion.huji.ac.il> wrote:</div><br class="Apple-interchange-newline"><div><meta charset="UTF-8"><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);">Hi Mario,<o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p> </o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);">I don’t know about “the best”, but in our RTA, we use 5% H2 and 95% N2. I think it’s pretty standard.<o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p> </o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);">Anyway, nobody complained yet<span class="Apple-converted-space"> </span></span><span lang="en-IL" style="font-family: "Segoe UI Emoji", sans-serif; color: rgb(0, 112, 192);">😊</span><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p> </o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);">Best regards,<o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p> </o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);">Golan.<o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p> </o:p></span></div><div><table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" style="border-collapse: collapse;"><tbody><tr><td width="85" valign="top" style="width: 63.55pt; padding: 0cm 5.4pt;"><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="color: rgb(31, 73, 125);"><span id="cid:image001.jpg@01DA6B1C.4FF280C0"><image001.jpg></span><span><o:p></o:p></span></span></div></td><td width="468" valign="top" style="width: 351.25pt; padding: 0cm 5.4pt;"><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><b><span style="font-size: 10pt; font-family: Arial, sans-serif;">Golan A. Tanami, PhD</span></b><span style="font-size: 10pt; font-family: Arial, sans-serif;"><span class="Apple-converted-space"> </span><b>|<span class="Apple-converted-space"> </span></b>Head of the Unit for Nanofabrication (UNF)<o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><b><span lang="HE" dir="RTL" style="font-size: 9pt; font-family: Arial, sans-serif;"><o:p> </o:p></span></b></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><b><span style="font-size: 10pt; font-family: Arial, sans-serif;">Center for Nanoscience and Nanotechnology<span lang="HE" dir="RTL"><o:p></o:p></span></span></b></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="font-size: 10pt; font-family: Arial, sans-serif;">Edmond J. Safra Campus<span lang="HE" dir="RTL"><br></span>The Hebrew University of Jerusalem<span lang="HE" dir="RTL"><br></span>T +972.2.6584179 | M +972.50.9891111</span><span lang="HE" dir="RTL" style="font-size: 10pt; font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><br></span><span dir="RTL"><a href="mailto:golant@savion.huji.ac.il" style="color: rgb(5, 99, 193); text-decoration: underline;"><span lang="EN-US" dir="LTR" style="color: blue;">golant</span><span lang="EN-US" dir="LTR" style="font-size: 10pt; font-family: Arial, sans-serif; color: blue;">@savion.huji.ac.il</span></a></span><span style="color: rgb(31, 73, 125);"><o:p></o:p></span></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span style="">follow us on</span><span style="color: rgb(0, 112, 192);"><span class="Apple-converted-space"> </span></span><a href="https://www.facebook.com/hujinanocenter/" style="color: rgb(5, 99, 193); text-decoration: underline;"><span style="color: blue;">Facebook</span></a><span style="color: rgb(31, 73, 125);"><span class="Apple-converted-space"> </span></span><span style="">@hujinanocenter</span><span style="color: rgb(31, 73, 125);"><o:p></o:p></span></div></td></tr></tbody></table><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="EN-US" style="color: rgb(0, 112, 192);"><o:p> </o:p></span></div></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL" style="font-family: Arial, sans-serif; color: rgb(0, 112, 192);"><o:p> </o:p></span></div><div><div style="border-width: 1pt medium medium; border-style: solid none none; border-color: rgb(225, 225, 225) currentcolor currentcolor; border-image: none; padding: 3pt 0cm 0cm;"><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><b><span lang="EN-US">From:</span></b><span lang="EN-US"><span class="Apple-converted-space"> </span>labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: rgb(5, 99, 193); text-decoration: underline;">labnetwork-bounces@mtl.mit.edu</a>><span class="Apple-converted-space"> </span><b>On Behalf Of<span class="Apple-converted-space"> </span></b>Beaudoin, Mario<br><b>Sent:</b><span class="Apple-converted-space"> </span>Tuesday, February 27, 2024 10:27 PM<br><b>To:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu" style="color: rgb(5, 99, 193); text-decoration: underline;">labnetwork@mtl.mit.edu</a><br><b>Subject:</b><span class="Apple-converted-space"> </span>[labnetwork] Forming gas: 5% or 10% hydrogen<o:p></o:p></span></div></div></div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL"><o:p> </o:p></span></div><p><span lang="en-IL">Dear Network,<o:p></o:p></span></p><p><span lang="en-IL">We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing?<o:p></o:p></span></p><p><span lang="en-IL">Regards,<o:p></o:p></span></p><p><span lang="en-IL">Mario<o:p></o:p></span></p><div><div style="margin: 0cm; font-size: 11pt; font-family: Calibri, sans-serif;"><span lang="en-IL">--<span class="Apple-converted-space"> </span><br><span id="cid:image002.jpg@01DA6B1C.4FF280C0"><image002.jpg></span><o:p></o:p></span></div></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;">labnetwork mailing list</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><a href="mailto:labnetwork@mtl.mit.edu" style="color: rgb(5, 99, 193); text-decoration: underline; font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px;">labnetwork@mtl.mit.edu</a><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" style="color: rgb(5, 99, 193); text-decoration: underline; font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px;">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"></div></blockquote></div><br></div></body></html>