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<p class="MsoNormal"><span style="font-size:11.0pt">I can’t offer anything with regards to the efficacy of a given percentage of hydrogen for the semiconductor annealing benefits, but one other item to consider is that hydrogen greater than 2.9% in nitrogen
is rated as flammable, while you can go up to 5.9% in argon and still remain nonflammable. Depending on your local fire codes and regulations, that may make a difference.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Additionally, some researchers prefer argon over nitrogen to avoid any risk of a nitrogen reaction with their substrate.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Dan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Daniel Woodie<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:standardcontextual">Director, Micro/Nano Fabrication Center, Princeton Materials Institute<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Jing Guo<br>
<b>Sent:</b> Thursday, February 29, 2024 3:17 PM<br>
<b>To:</b> Golan Tanami <golant@savion.huji.ac.il><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Forming gas: 5% or 10% hydrogen<o:p></o:p></span></p>
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<p class="MsoNormal">Hi Mario, <o:p></o:p></p>
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<p class="MsoNormal">We also use 5% H2 in N2 as our forming gas on RTP system. <o:p></o:p></p>
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<p class="MsoNormal">Jing<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Jing Guo Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Research Scientist<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">SEA Cleanroom (SST 017)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Rice University<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Houston, TX <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"><a href="mailto:jeanne.guo@rice.edu">jeanne.guo@rice.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">713-348-8227<o:p></o:p></span></p>
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<p class="MsoNormal">On Feb 29, 2024, at 6:35 AM, Golan Tanami <<a href="mailto:golant@savion.huji.ac.il">golant@savion.huji.ac.il</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Hi Mario,</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"> </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">I don’t know about “the best”, but in our RTA, we use 5% H2 and 95% N2. I think it’s pretty standard.</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Anyway, nobody complained yet<span class="apple-converted-space"> </span></span><span style="font-size:11.0pt;font-family:"Segoe UI Emoji",sans-serif;color:#0070C0">😊</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Best regards,</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0">Golan.</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#0070C0"> </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Golan A. Tanami, PhD</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> </span></span><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">|<span class="apple-converted-space"> </span></span></b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Head
of the Unit for Nanofabrication (UNF)</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span dir="RTL"></span><span dir="RTL"></span><b><span lang="HE" dir="RTL" style="font-size:9.0pt;font-family:"Arial",sans-serif"><span dir="RTL"></span><span dir="RTL"></span> </span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Center for Nanoscience and Nanotechnology</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Edmond J. Safra Campus</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">The Hebrew University of Jerusalem</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif"><br>
</span><span style="font-size:10.0pt;font-family:"Arial",sans-serif">T +972.2.6584179 | M +972.50.9891111</span><span lang="HE" dir="RTL" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#0070C0"><br>
</span><span lang="AR-SA" dir="RTL" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><a href="mailto:golant@savion.huji.ac.il"><span lang="EN-US" dir="LTR">golant</span><span lang="EN-US" dir="LTR" style="font-size:10.0pt;font-family:"Arial",sans-serif">@savion.huji.ac.il</span></a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">follow us on<span class="apple-converted-space"><span style="color:#0070C0"> </span></span><a href="https://www.facebook.com/hujinanocenter/">Facebook</a><span class="apple-converted-space"><span style="color:#1F497D"> </span></span>@hujinanocenter<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork
<<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:#0563C1">labnetwork-bounces@mtl.mit.edu</span></a>><span class="apple-converted-space"> </span><b>On Behalf Of<span class="apple-converted-space"> </span></b>Beaudoin, Mario<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Tuesday, February 27, 2024 10:27 PM<br>
<b>To:</b><span class="apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu"><span style="color:#0563C1">labnetwork@mtl.mit.edu</span></a><br>
<b>Subject:</b><span class="apple-converted-space"> </span>[labnetwork] Forming gas: 5% or 10% hydrogen<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Dear Network,</span><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen %
to use for MOS capacitor annealing?</span><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Regards,</span><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Mario</span><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">--<span class="apple-converted-space"> </span><br>
<image002.jpg></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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