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<p class="MsoNormal">I believe it depends on the metals and how easy they are to remove from the chamber rather than coat it.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">For a long time we didn’t allow any metals – after somebody used Al as a mask and caused endless problems with grassing from the contamination. We currently try not allow metals if possible but have occasionally used Cr as a mask and not
seen any issues.<o:p></o:p></p>
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<p class="MsoNormal">Best regards<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Peter<o:p></o:p></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Hadi Esmaeilsabzali<br>
<b>Sent:</b> 26 April 2024 17:25<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Metals in DRIE chamber<o:p></o:p></span></p>
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<p><span style="color:black">For those who operate a DRIE system (specifically SPTS Rapier), I am wondering what your policy is with regard to allowing metallized wafers inside the chamber? Generally, SPTS recommends against any metal, particularly as the mask,
in their Rapier DRIE system (though metals may be used as the etch stop). How do you go about wafers with some (say >5% total surface area) metal features that are coated with enough photoresist to avoid exposure to the plasma and contaminate the chamber?
This should be safe in theory, but do you have any experience with this approach in practice? <o:p></o:p></span></p>
<p><span style="color:black"><o:p> </o:p></span></p>
<p><span style="color:black">Any feedback is greatly appreciated!<o:p></o:p></span></p>
<p><span style="color:black"><o:p> </o:p></span></p>
<p><span style="color:black">Regards,<o:p></o:p></span></p>
<p><span style="color:black">Hadi<o:p></o:p></span></p>
<p><span style="color:black"><o:p> </o:p></span></p>
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<p><b><span style="color:#212121">Hadi Esmaeilsabzali, PhD</span></b><span style="font-size:11.5pt;font-family:"Segoe UI",sans-serif;color:#212121"><o:p></o:p></span></p>
<p><span style="color:#212121">4D LABS, Simon Fraser University<o:p></o:p></span></p>
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