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<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Dear Lab network,</span></p>
<p><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"> </span></p>
<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">First time caller here
</span><span style="font-family: "Segoe UI Emoji", sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">😊 </span></p>
<p class="elementToProof"><span style="font-family: "Segoe UI Emoji", sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"><br>
</span></p>
<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">I am new to plasma etching, and working to institute better process control in our ICP
and RIE etchers in an academic shared use facility. We don’t have the capacity to designate a single etcher for each process, so between our three tools, we essentially have a most-restricted, somewhat restricted, and “dirty” tool. To avoid cross contamination
and chamber residue buildup, we have a technician manually scrub out the chambers with IPA every week- usually seeing the most solid residue in our ICP that handles Lithium Niobate milling.</span></p>
<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"><br>
</span></p>
<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">My question is- while many products of etch reactions get pumped away as vapors, what
about the reactions that do leave solid residues? Is there a systematic way to predict or look up what solids will be left from common (or unusual) reactions, and know how they will react and interact with other solids and gasses present in your chamber? Especially
with such frequent manual cleaning, how do you ensure that you don’t inadvertently open the chamber to something acutely toxic, pyrophoric, shock sensitive, etc?</span></p>
<p><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"> </span></p>
<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Very curious to learn what steps people take and tools they use (literature? calculations?
databases? forums?) when approaching this problem, and when asked to allow a new material into a tool.</span></p>
<p class="elementToProof"><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);"><br>
</span></p>
<p><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Best,</span></p>
<p><span style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">Emma</span></p>
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<b>_____________________________________________</b></div>
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<b>Emma Anquillare, PhD</b></div>
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Research Scientist</div>
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<span style="font-size: 12pt;">ASRC </span><span style="font-size: 16px; background-color: rgb(255, 255, 255);">Nanofabrication Facility</span></div>
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<span style="background-color: rgb(255, 255, 255);">City University of New York</span></div>
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<img id="image_0" width="337" height="77" style="width: 337px; height: 77px;" data-outlook-trace="F:1|T:1" src="cid:f4193b2c-f1f5-480a-965b-1cf3ed49367d"></div>
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<i>Catalyzing Change, Celebrating Gains: </i></div>
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<i>A decade of visionary science for the public good.</i></div>
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