<!DOCTYPE html>
<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=UTF-8">
</head>
<body>
Hi Michael,<br>
<br>
We use a pulsed laser deposition tool for this material and other
oxides. We have both VO2 and V2O5 targets. The sample holder is
heated and we flow a bit of O2 into the chamber during the
deposition.<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="https://udnf.udel.edu">https://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 5/9/2024 12:28 PM, Martin, Michael
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:BN9PR03MB617080CB3DECB534E26CE6F3F2E62@BN9PR03MB6170.namprd03.prod.outlook.com">
<meta http-equiv="Content-Type" content="text/html; charset=UTF-8">
<style type="text/css" style="display:none;">P {margin-top:0;margin-bottom:0;}</style>
<div class="elementToProof"
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
Hi gang,</div>
<div class="elementToProof"
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
I believe this question has been raised before on this forum
but I'm not sure there were many clear answers. I have a user
that is interested in depositing vanadium oxide (VO2) and was
wondering if anyone can provide guidance on how you deposit
vanadium oxide safely in a multi-user tool. I think most
institutions are depositing this from vanadium metal reactively,
but we'd like to hear how labs deal with the possibility of
contamination from the other toxic oxidation states. How do you
safely clean your chamber? What steps do you use to keep users
safe when they are using the sputtering tool after VO2
deposition? Are there any other protocols you have in place for
VO2? Are the concerns regarding V2O5 just overblown? </div>
<div class="elementToProof"
style="font-family: Aptos, Aptos_EmbeddedFont, Aptos_MSFontService, Calibri, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);">
<br>
</div>
<div id="Signature">
<div id="divtagdefaultwrapper" dir="ltr"
style="font-size:12pt;color:#000000;font-family:Calibri,Helvetica,sans-serif">
<p style="margin-top: 0px; margin-bottom: 0px;">Regards,</p>
<p style="margin-top: 0px; margin-bottom: 0px;"> Michael
Martin, Ph.D.</p>
<p style="margin-top: 0px; margin-bottom: 0px;"><br>
</p>
<p style="margin-top: 0px; margin-bottom: 0px;">Engineering
Senior Researcher </p>
<p style="margin-top: 0px; margin-bottom: 0px;">Micro/Nano
Technology Center</p>
<p style="margin-top: 0px; margin-bottom: 0px;">University of
Louisville<br>
</p>
<span
style="font-family: Calibri, sans-serif; font-size: 11pt; color: rgb(0, 0, 0);">(502)
552-1945</span><br>
<p style="margin-top: 0px; margin-bottom: 0px;"><span
style="color: rgb(12, 100, 192);"><a
href="https://louisville.edu/micronano"
title="https://louisville.edu/micronano"
style="color: rgb(12, 100, 192); margin-top: 0px; margin-bottom: 0px;"
moz-do-not-send="true">Web page</a> <a
href="https://www.instagram.com/micronanolouisville/"
title="https://www.instagram.com/micronanolouisville/"
style="color: rgb(12, 100, 192); margin-top: 0px; margin-bottom: 0px;"
moz-do-not-send="true">Instagram</a>
<a href="https://www.facebook.com/MNTCUOFL/"
title="https://www.facebook.com/MNTCUOFL/"
style="color: rgb(12, 100, 192); margin-top: 0px; margin-bottom: 0px;"
moz-do-not-send="true">
Facebook</a> <a
href="https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q"
title="https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q"
style="color: rgb(12, 100, 192); margin-top: 0px; margin-bottom: 0px;"
moz-do-not-send="true">
YouTube</a> <a
href="https://www.tiktok.com/@micronanolouisville?is_from_webapp=1&sender_device=pc"
title="https://www.tiktok.com/@micronanolouisville?is_from_webapp=1&sender_device=pc"
style="color: rgb(12, 100, 192); margin-top: 0px; margin-bottom: 0px;"
moz-do-not-send="true">
TikTok</a></span></p>
<b><br>
</b></div>
</div>
<br>
<fieldset class="moz-mime-attachment-header"></fieldset>
<pre class="moz-quote-pre" wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
</pre>
</blockquote>
<br>
</body>
</html>