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Hello labnetwork,</div>
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I have a user that is fabricating some electrodes and has observed what appears to be arcing between the sharp points of the electrodes. Imagine features like this: > < where the distance between them is 2um - 8um. The substrate is quartz. Fabrication approach
is 1) ebeam lithography 2) ebeam evaporation and 3) lift-off.</div>
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After EBL development, the electrode circuit is open, as intended</div>
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After evaporation +lift-off, there is a line about few 100nms wide that is shorting the electrodes: >-<</div>
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There is not a short between the electrodes with the 8um gap, however, there are some metal lines extending from the two sides: >- -<</div>
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All of this suggests that arcing is occurring. Has anyone observed this before and can you suggest ways to get around it?</div>
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Thanks,</div>
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Bob</div>
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Bob Geil, PhD </div>
<div style="margin: 0px; font-family: Arial, sans-serif; color: rgb(0, 0, 0);"><span style="font-size: 10pt;">Technical Director
</span><span style="font-size: 13px;">•</span><span style="font-size: 10pt;"> CHANL</span></div>
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Dept. of Chemistry • UNC-CH</div>
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Chapel Hill, NC </div>
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