<div dir="ltr">Hi Long, <div><br></div><div>We use 10min@65C and 30min@95C for thick SU-8 pre-bake. One of our users leaves the pre-baked wafer on a flat surface overnight and runs the exposure the next day, it seems like the film height uniformity can be slightly improved.</div><div><br></div><div>Best, </div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Sat, Jun 8, 2024 at 10:46 AM Howard Northfield <<a href="mailto:Howard.Northfield@uottawa.ca">Howard.Northfield@uottawa.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-3147448134291814443">




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Bake it longer:</div>
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(rt to 65°C@200°C/min)+(10min@65°C)+(65°C to 95°C@200°C/min)+(30min@95°C)+(95°C to rt)</div>
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Clean the mask as you would develop; in a bath of SU-8 developer and spray rinse, followed by IPA bath and rinse.</div>
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Howard Northfield</div>
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Research Associate</div>
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Advanced Research Complex (ARC)</div>
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University of Ottawa</div>
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<div id="m_-8656343098025639131divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Chang, Long <<a href="mailto:lvchang@Central.UH.EDU" target="_blank">lvchang@Central.UH.EDU</a>><br>
<b>Sent:</b> Friday, June 7, 2024 5:50 PM<br>
<b>To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Photomask sticks to SU8</font>
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<div style="font-size:9pt;font-family:calibri;color:rgb(255,66,51)"><b>Attention : courriel externe | external email</b></div>
<div>Hello,
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<div>I just used Quartz Cr photomask for the first time with SU8 3050 and the SU8 stuck to the photomask after exposure, see photo. How can I prevent SU8 from sticking to my mask? How should I clean the mask?</div>
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<div>Thanks,<br>
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<div>Long Chang</div>
<div>UH Nanofabrication Facility</div>
<div>Houston, TX</div>
<div><a href="mailto:lvchang@central.uh.edu" target="_blank">lvchang@central.uh.edu</a></div>
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</div></blockquote></div><br clear="all"><div><br></div><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><font color="#0b5394"><img width="96" height="95" src="https://ci3.googleusercontent.com/mail-sig/AIorK4x_Y6s1D-QRl-0PHmw-IKysmBp1Gr83JeY3kMWLc6K2VhCqyd-PX_9Jh3QjaDEpSxLygmnUyHk"><br></font></div><div dir="ltr"><font face="monospace" color="#0b5394" size="4"><b>Zhichao "Chao" Wang, Ph.D.</b></font></div><div dir="ltr"><i><font color="#0b5394" face="trebuchet ms, sans-serif">Lithography Engineer</font></i></div><div dir="ltr"><font color="#0b5394" face="trebuchet ms, sans-serif"><i>UDNF</i></font></div><div><font color="#0b5394" face="trebuchet ms, sans-serif"><i>University of Delaware</i></font></div><div><font face="trebuchet ms, sans-serif"><i><font color="#0b5394">Pronouns: He/Him/His</font></i><font color="#0b5394"><i><br></i></font></font></div><div><i><font color="#0b5394" face="trebuchet ms, sans-serif"><span style="font-size:12px">------------------------</span></font></i></div><div dir="ltr"><i><font color="#0b5394" face="trebuchet ms, sans-serif">Office Number：(302) 831-4839</font></i></div><div dir="ltr"><font color="#0b5394" face="trebuchet ms, sans-serif"><i>221 Academy St.，RM170</i></font></div><div dir="ltr"><font color="#0b5394" face="trebuchet ms, sans-serif"><i>Newark, DE 19711</i></font></div></div></div></div></div>