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Thanks everyone. I got the mask mostly clean with SU8 developer. Can’t wait to try again with more baking. Anyone has tips for easy and repeatable edge bead removal? I’m thinking about using a Q-tip dipped in acetone while the wafer is spinning at 500 rpm.
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<div>Long Chang</div>
<div>UH Nanofabrication Facility</div>
<div>Houston, TX</div>
<div><a href="mailto:lvchang@central.uh.edu" class="">lvchang@central.uh.edu</a></div>
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<div class="">On Jun 10, 2024, at 8:25 AM, Zhichao Wang <<a href="mailto:zhichaow@udel.edu" class="">zhichaow@udel.edu</a>> wrote:</div>
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<div dir="ltr" class="">Hi Long,
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<div class="">We use 10min@65C and 30min@95C for thick SU-8 pre-bake. One of our users leaves the pre-baked wafer on a flat surface overnight and runs the exposure the next day, it seems like the film height uniformity can be slightly improved.</div>
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<div class="">Best, </div>
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<div dir="ltr" class="gmail_attr">On Sat, Jun 8, 2024 at 10:46 AM Howard Northfield <<a href="mailto:Howard.Northfield@uottawa.ca" class="">Howard.Northfield@uottawa.ca</a>> wrote:<br class="">
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Bake it longer:</div>
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(rt to 65°C@200°C/min)+(10min@65°C)+(65°C to 95°C@200°C/min)+(30min@95°C)+(95°C to rt)</div>
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Clean the mask as you would develop; in a bath of SU-8 developer and spray rinse, followed by IPA bath and rinse.</div>
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Howard Northfield</div>
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Research Associate</div>
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Advanced Research Complex (ARC)</div>
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University of Ottawa</div>
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<div id="m_-8656343098025639131divRplyFwdMsg" dir="ltr" class=""><font face="Calibri, sans-serif" style="font-size:11pt" class=""><b class="">From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" class="">labnetwork-bounces@mtl.mit.edu</a>>
on behalf of Chang, Long <<a href="mailto:lvchang@Central.UH.EDU" target="_blank" class="">lvchang@Central.UH.EDU</a>><br class="">
<b class="">Sent:</b> Friday, June 7, 2024 5:50 PM<br class="">
<b class="">To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank" class="">labnetwork@mtl.mit.edu</a>><br class="">
<b class="">Subject:</b> [labnetwork] Photomask sticks to SU8</font>
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<div style="font-size:9pt;font-family:calibri;color:rgb(255,66,51)" class=""><b class="">Attention : courriel externe | external email</b></div>
<div class="">Hello,
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<div class="">I just used Quartz Cr photomask for the first time with SU8 3050 and the SU8 stuck to the photomask after exposure, see photo. How can I prevent SU8 from sticking to my mask? How should I clean the mask?</div>
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<div class="">Thanks,<br class="">
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<div class="">Long Chang</div>
<div class="">UH Nanofabrication Facility</div>
<div class="">Houston, TX</div>
<div class=""><a href="mailto:lvchang@central.uh.edu" target="_blank" class="">lvchang@central.uh.edu</a></div>
<div class=""><span id="cid:ii_190025299742bff22291"><Screen Shot 2024-06-07 at 4.48.32 PM.png></span></div>
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<div dir="ltr" class=""><font face="monospace" color="#0b5394" size="4" class=""><b class="">Zhichao "Chao" Wang, Ph.D.</b></font></div>
<div dir="ltr" class=""><i class=""><font color="#0b5394" face="trebuchet ms, sans-serif" class="">Lithography Engineer</font></i></div>
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<div class=""><font color="#0b5394" face="trebuchet ms, sans-serif" class=""><i class="">University of Delaware</i></font></div>
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<div dir="ltr" class=""><i class=""><font color="#0b5394" face="trebuchet ms, sans-serif" class="">Office Number：(302) 831-4839</font></i></div>
<div dir="ltr" class=""><font color="#0b5394" face="trebuchet ms, sans-serif" class=""><i class="">221 Academy St.，RM170</i></font></div>
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