<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body style="overflow-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">Hello, Everyone,<div><br></div><div>I am at UC Davis trying to setup some wafer lapping and CMP tools for heterogeneous integration (III-V or other materials on Silicon on Insulator wafers).</div><div><br></div><div>We have a nice set of EVG plasma activation and wafer bonding tools, but we don’t have wafer lapping or CMP tools at UC Davis.</div><div><br></div><div>We got a quotation for a new DISCO DAG810 wafer lapping tool and another quotation for a new AXUS CMP tool.</div><div><br></div><div>Unfortunately they are too expensive for us.</div><div><br></div><div>Does anyone have good solutions for lower cost methods or lower cost tools?</div><div><br></div><div>We are trying to wafer bond III-V wafers (GaAs or InP, 2 -3 inch diameter, ~500 micron thickness) on SOI wafers (150 mm typical), and then lap the III-V wafers down to ~100 micron before chemically selectively etching the rest of the III-V substrate material (GaAs or InP) stopping at the etch stop layer.</div><div><br></div><div>In some other structures, we also do CMP of similar wafers with devices on them.</div><div><br></div><div>Please let me know if you know of less expensive solutions.</div><div><br></div><div>It would be nice if we can find a ~40% discounted solution (we can use refurbished units).</div><div><br></div><div>Thank you all.</div><div><br></div><div>-Ben</div><div><br></div><div><br></div><div><br><div>
<meta charset="UTF-8"><div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;"><div style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;">_______________________________________________________________________________<br><br>S. J. Ben Yoo<br>Joint Faculty LBL and UC Davis <br>Distinguished Professor, Department of Electrical and Computer Engineering<br>Room 3110, Kemper Hall<br>Mail Code 1915<br>University of California<br>Davis, California 95616<br>Mobile: (510) 407-2457<br>Fax: (530) 752-8428<br>email: sbyoo@ucdavis.edu<br>home page: http://sierra.ece.ucdavis.edu<br>_______________________________________________________________________________ </div></div>
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<br><div><blockquote type="cite"><div>On Jun 14, 2024, at 10:03 AM, Vlahakis, James <James.Vlahakis@tufts.edu> wrote:</div><br class="Apple-interchange-newline"><div><meta charset="UTF-8"><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;">Hi Matt, thanks for the info, much appreciated.<o:p></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;"><o:p> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;">Our lab (<a href="https://engineering.tufts.edu/microfab/tufts-micro-and-nano-fabrication-facility" style="color: blue; text-decoration: underline;">link</a>) is leased, repurposed space about ¼ mile off campus, among a number of university labs located here. The administration is interested moving the lab(s) to on campus location(s) which would reduce some costs. Obviously there would be other expenses, but those seem to come out of a different, less critical cost center.<o:p></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;"><o:p> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;">We would like to reproduce the capabilities – lithography, PVD, CVD, chemical processing, characterization, etc. - in our current space and require at least as much room ~1200sq ft. I would push hard for more space though. Where this might be located on campus is unknown right now<o:p></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;"><o:p> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;">A new cleanroom is many years away – so the administration would like to know more about temporary space and thus I am putting together information for them<o:p></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;"><o:p> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;">jim<o:p></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;"><o:p> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="font-size: 11pt;"><o:p> </o:p></span></div><div><div style="border-width: 1pt medium medium; border-style: solid none none; border-color: rgb(225, 225, 225) currentcolor currentcolor; border-image: none; padding: 3pt 0in 0in;"><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><b><span style="font-size: 11pt; font-family: Calibri, sans-serif;">From:</span></b><span style="font-size: 11pt; font-family: Calibri, sans-serif;"><span class="Apple-converted-space"> </span>Matthew Moneck <<a href="mailto:mmoneck@andrew.cmu.edu" style="color: blue; text-decoration: underline;">mmoneck@andrew.cmu.edu</a>><br><b>Sent:</b><span class="Apple-converted-space"> </span>Wednesday, June 12, 2024 1:15 PM<br><b>To:</b><span class="Apple-converted-space"> </span>Vlahakis, James <<a href="mailto:James.Vlahakis@tufts.edu" style="color: blue; text-decoration: underline;">James.Vlahakis@tufts.edu</a>><br><b>Cc:</b><span class="Apple-converted-space"> </span>Labnetwork <<a href="mailto:labnetwork@mtl.mit.edu" style="color: blue; text-decoration: underline;">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b><span class="Apple-converted-space"> </span>[External] Re: [labnetwork] Temporary Cleanroom Spaces<o:p></o:p></span></div></div></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><o:p> </o:p></div><div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);">Hi Jim,<o:p></o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);"><o:p> </o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);">I have had experience in building and using modular cleanrooms in the past for single tool installs, clean assembly projects, 2D exfoliation, and more . We have used options ranging from a small 6'x6' softwall unit with curtains, a single FFU, and casters for mobility all the way up to a 19'x20' hardwall option designed to perform close to Class 100 specs. In one case we converted an entire room into a Class 10,000 space. Options vary significantly depending on the size needed, the applications of interest (i.e. what type of tooling you plan to install or work to be done), and how "modular" it needs to be. <o:p></o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);"><o:p> </o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);">What size and type of application do you have in mind?<o:p></o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);"><o:p> </o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);">We have worked with Clean Air Products in the past and were happy with the outcome. <o:p></o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);"><o:p> </o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);">Best Regards,<o:p></o:p></span></div></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span style="color: rgb(11, 83, 148);"><br>Matt<o:p></o:p></span></div></div></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><o:p> </o:p></div><div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">On Wed, Jun 12, 2024 at 12:11<span style="font-family: Arial, sans-serif;"> </span>PM Vlahakis, James <<a href="mailto:James.Vlahakis@tufts.edu" style="color: blue; text-decoration: underline;">James.Vlahakis@tufts.edu</a>> wrote:<o:p></o:p></div></div><blockquote style="border-width: medium medium medium 1pt; border-style: none none none solid; border-color: currentcolor currentcolor currentcolor rgb(204, 204, 204); border-image: none; padding: 0in 0in 0in 6pt; margin: 5pt 0in 5pt 4.8pt;"><div><div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">Hi Labnetwork friends, hope your summer is going well.<o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"> <o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">Our university administration is discussing a temporary or modular cleanroom space – not the first time this has come up but it seems a bit more serious this time around. I’ve asked similar questions in the past but it seems more serious now so I am drilling down again…..<o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"> <o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">Does anyone have experience with these cleanrooms, especially in a university setting? Contact info for a supplier would certainly be a help. Any info on this area would be greatly appreciated<o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"> <o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">Thanks!<o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"> <o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">jim<o:p></o:p></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"> <o:p></o:p></div></div></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">_______________________________________________<br>labnetwork mailing list<br><a href="mailto:labnetwork@mtl.mit.edu" target="_blank" style="color: blue; text-decoration: underline;">labnetwork@mtl.mit.edu</a><br><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank" style="color: blue; text-decoration: underline;">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></div></div></blockquote></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><br clear="all"><o:p></o:p></div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><o:p> </o:p></div></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><span class="gmailsignatureprefix">--</span><o:p></o:p></div><div><div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;">--<br>Matthew T. Moneck, Ph.D<br>Executive Director, Claire & John Bertucci Nanotechnology Laboratory<br>Electrical & Computer Engineering | Carnegie Mellon University<br>5000 Forbes Avenue, Pittsburgh, PA 15213-3890<br>Phone: 412-268-5430<br><a href="http://ece.cmu.edu/" target="_blank" style="color: blue; text-decoration: underline;">ece.cmu.edu</a><br><a href="http://nanofab.ece.cmu.edu/" target="_blank" style="color: blue; text-decoration: underline;">nanofab.ece.cmu.edu</a> <o:p></o:p></div></div></div><div style="margin: 0in 0in 0in 0.5in; font-size: 12pt; font-family: Aptos, sans-serif;"><o:p> </o:p></div><table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" align="left" width="100%" style="width: 645px;"><tbody><tr><td style="background: rgb(0, 160, 210); padding: 5pt 2pt;"></td><td width="99%" style="width: 617.734375px; background: rgb(229, 245, 250); padding: 5pt 4pt 5pt 12pt;"><div><div style="margin: 0in; font-size: 12pt; font-family: Aptos, sans-serif;"><b><span style="color: rgb(34, 34, 34);">Caution:</span></b><span style="color: rgb(34, 34, 34);"><span class="Apple-converted-space"> </span>This message originated from outside of the Tufts University organization. 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