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Hello LabNetwork folks,</div>
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I have a user that wishes to use a carbon target in our sputter tool. I have a couple of questions:</div>
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<div class="elementToProof">What, if any, concerns should we have regarding cross-contamination. We typically use the sputter tool for metals and dielectrics.</div>
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<div class="elementToProof">Any suggestions, lessons learned if you have used such targets in the past.</div>
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Greatly appreciate any input you can provide. Thanks!</div>
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Kind Regards, </div>
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Matthias Pleil, Ph.D.</div>
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Director Manufacturing Engineering Program</div>
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<span style="background-color: rgb(255, 255, 255);">UNM MTTC Cleanroom Manager</span></div>
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Research Professor & Senior Lecturer III of Mech. Eng - UNM</div>
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PI - NSF Support Center for Microsystems Education</div>
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