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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">We had thermocouples with plates attached for monitoring of indirect substrate IR heating in our old 1.15m throw lift off evaporator. Which was also very useful for monitoring lift off processes,
as a general indicator of wafer temperature. Any deposition with reasonable power such as Pt indeed could easily heat to ~120C without too much trouble. Even low power Al could, as the crucibles had a large emitting IR area with a full melt.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">I think the record was Ta or Mo, we easily went over 150C and had to run the deposition in several shorter runs to not cook the negative resist.
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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">BR, O.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Yakimov, Michael<br>
<b>Sent:</b> Wednesday, July 17, 2024 2:04 PM<br>
<b>To:</b> Youry Borisenkov <yb2471@columbia.edu>; Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Lead (Pb) evaporation<o:p></o:p></span></p>
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<span style="font-size:9.0pt;font-family:"Segoe UI",sans-serif;color:#212121">You don't often get email from
<a href="mailto:myakimov@albany.edu">myakimov@albany.edu</a>. <a href="https://aka.ms/LearnAboutSenderIdentification">
Learn why this is important</a><o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span style="font-size:10.5pt;color:#8D3970"> This e-mail originated outside the
University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">EHS concerns aside, I wouldn't go with the idea for cross-contamination and process control reasons.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">My personal rule of thumb is 1e-6@600C to start the conversation.Pb has a vapor pressure of 1e-6@420C.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black"> For <600C materials that means they will evaporate before crucible is red hot - hard to tune electron beam and visually control the deposition that way. May be easier
with resistive process though.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Aptos",sans-serif;color:black">The other thing is when you're running something high temperature, like Pt or Mo, things become pretty hot inside. Anecdotally, I had substrate - pretty far away
from the source - go above 150C during Pt deposition. I don't know how high the source shutter would go, but 400C seems pretty plausible. Re-evaporation isn't something people like to think about in terms other than how to avoid that...<o:p></o:p></span></p>
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<div id="Signature">
<p><span style="color:black">_______________________________________________</span><o:p></o:p></p>
<p><span style="color:black">Michael Yakimov</span><o:p></o:p></p>
<p><span style="color:black">Research scientist</span><o:p></o:p></p>
<p><span style="color:black">Department of Nanoscale Science and Engineering</span><o:p></o:p></p>
<p><span style="color:black">University at Albany - State University of NY</span><o:p></o:p></p>
<p><span style="color:black"> </span><o:p></o:p></p>
<p><span style="color:black">253 Fuller rd.</span><o:p></o:p></p>
<p><span style="color:black">Albany NY 12203</span><o:p></o:p></p>
<p><span style="color:black"> </span><o:p></o:p></p>
<p><span style="color:black">Phone: 518-437-8609 lab</span><o:p></o:p></p>
<p><span style="color:black">e-mail: <a href="mailto:myakimov@albany.edu">myakimov@albany.edu</a></span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="color:black">From:</span></b><span style="color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Youry Borisenkov <<a href="mailto:yb2471@columbia.edu">yb2471@columbia.edu</a>><br>
<b>Sent:</b> Tuesday, July 16, 2024 3:57 PM<br>
<b>To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Lead (Pb) evaporation</span> <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Hi All, <o:p></o:p></p>
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<p class="MsoNormal">Do any of you allow Lead (Pb) deposition on your evaporation tools?<o:p></o:p></p>
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<p class="MsoNormal">If so, what are the precautions that you take to avoid Lead exposure hazards during PM,etc?<br clear="all">
<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span class="xgmailsignatureprefix">-- </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#888888">Thank you,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Youry Borisenkov<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888"><a href="https://cni.columbia.edu/columbia-university-clean-room" target="_blank">CNI</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">Columbia University<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#888888">CEPSR 1017, New York, NY, 10027, United States.<o:p></o:p></span></p>
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<p class="MsoNormal"><a href="https://sustainable.columbia.edu/crown-commuter" target="_blank"><span style="color:#1155CC;text-decoration:none"><img border="0" width="96" height="40" style="width:1.0in;height:.4166in" id="_x0000_i1026" src="https://sustainable.columbia.edu/sites/default/files/content/crown%20commuter%20badge_0.png"></span></a><span style="color:#888888"><o:p></o:p></span></p>
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