<div dir="ltr"><div class="gmail_default" style="color:#0b5394">Hi Matthias,</div><div class="gmail_default" style="color:#0b5394"><br></div><div class="gmail_default" style="color:#0b5394">We have done a lot of carbon sputtering and the only real issue we encounter is particulate.  The sputtered carbon can have poor adhesion.  Therefore, it tends to flake off of shields and other components coated during sputtering, ultimately forming fine particulate.  We only allow it in one tool for that reason.  That tool also has very good target isolation and shielding, so the particulate we form stays concentrated mainly to that target area, minimizing the risk of cross-contamination.  </div><div class="gmail_default" style="color:#0b5394"><br></div><div class="gmail_default" style="color:#0b5394">Best Regards,<br><br>Matt</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Jul 17, 2024 at 8:06 AM Matthias Pleil <<a href="mailto:mpleil@unm.edu">mpleil@unm.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg5243029269300502320">




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Hello LabNetwork folks,</div>
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I have a user that wishes to use a carbon target in our sputter tool.  I have a couple of questions:</div>
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<div>What, if any, concerns should we have regarding cross-contamination.  We typically use the sputter tool for metals and dielectrics.</div>
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<div>Any suggestions, lessons learned if you have used such targets in the past.</div>
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Greatly appreciate any input you can provide.  Thanks!</div>
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Kind Regards, </div>
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Matthias Pleil, Ph.D.</div>
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Director Manufacturing Engineering Program</div>
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<span style="background-color:rgb(255,255,255)">UNM MTTC Cleanroom Manager</span></div>
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Research Professor & Senior Lecturer III of Mech. Eng - UNM</div>
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PI - NSF Support Center for Microsystems Education</div>
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</div></blockquote></div><br clear="all"><div><br></div><span class="gmail_signature_prefix">-- </span><br><div dir="ltr" class="gmail_signature"><div dir="ltr"><p class="MsoNormal">--<br>
Matthew T. Moneck, Ph.D<br>
Executive Director, Claire & John Bertucci Nanotechnology Laboratory<br>
Electrical & Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Avenue, Pittsburgh, PA 15213-3890<br>
Phone: 412-268-5430<br>
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<a href="http://nanofab.ece.cmu.edu" target="_blank">nanofab.ece.cmu.edu</a> </p></div></div>