<div dir="ltr"><div class="gmail_default" style="font-family:georgia,serif;font-size:small">Hey Matt,</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">We have done Carbon Dep in our E-Beams (not sure about sputter), and I can tell you that, because it doesn't adhere well to the metals typically dep'd in our EBeams, thick layers can cause flaking from chamber tooling sooner than expected.  </div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">However, Thin layers (~20nm) have generally not been an issue. For thicker layers (something like >200nm?) required us to schedule tooling PM right after the dep.</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small"><br></div><div class="gmail_default" style="font-family:georgia,serif;font-size:small">We have not had any mention of contamination as far as I know, from users that use the tools.  Many of the eBeam crucible liners are graphite as well, so I suppose Carbon is already present in those chambers.</div><div class="gmail_default" style="font-family:georgia,serif;font-size:small"><br></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><font face="georgia, serif" size="4">-- Demis </font><font face="georgia, serif" size="1">(<a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" target="_blank">contact info</a>)</font><div><i style="font-family:"times new roman",serif">Reminder</i><span style="font-family:"times new roman",serif">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif" target="_blank">publications policy</a><font face="georgia, serif" size="4"><br></font></div></div></div></div><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Jul 17, 2024 at 5:05 AM Matthias Pleil <<a href="mailto:mpleil@unm.edu">mpleil@unm.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-5565127869693934437">




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Hello LabNetwork folks,</div>
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I have a user that wishes to use a carbon target in our sputter tool.  I have a couple of questions:</div>
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<div>What, if any, concerns should we have regarding cross-contamination.  We typically use the sputter tool for metals and dielectrics.</div>
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<div>Any suggestions, lessons learned if you have used such targets in the past.</div>
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Greatly appreciate any input you can provide.  Thanks!</div>
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Kind Regards, </div>
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Matthias Pleil, Ph.D.</div>
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Director Manufacturing Engineering Program</div>
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<span style="background-color:rgb(255,255,255)">UNM MTTC Cleanroom Manager</span></div>
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Research Professor & Senior Lecturer III of Mech. Eng - UNM</div>
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PI - NSF Support Center for Microsystems Education</div>
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