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<p class="MsoNormal">Hi Labnetwork,<o:p></o:p></p>
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<p class="MsoNormal">We recently purchased a new DRIE and are left without any users for our older but still functional STS Multiplex ASE. We are currently debating selling off the tool or turning it into a “dirty” tool and allowing metals inside the chamber,
which has been a commonly requested process for as long as we have had it. I’m curious if anyone else has tried this with their DRIE and what kind of results you saw regarding the long-term viability of the tool.<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Curt McKenna</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Facilities Manager, Micro/Nano Technology Center</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">University of Louisville</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">2210 South Brook Street</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Shumaker Research Building, Room 232</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Louisville, KY 40292</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"><a href="http://louisville.edu/micronano"><span style="color:blue">http://louisville.edu/micronano/</span></a></span><o:p></o:p></p>
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