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Hi Curt,</div>
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Hope you are doing well. If for any reason you end up wanting to get rid of the machine do let us know as we are struggling with out old STS tool and may be interested to buy yours either for repairing ours or as a direct replacement. If possible
kindly share a picture of your existing STS tool, just for our information which brand and model RIE did you buy and what was the approximate cost (is sharing cost is not a problem). As far as I am aware STPS/STS has been bought over by KLA Tencor and they
don't make machines for university research environment any more (kindly correct me if I am aware if they still do).</div>
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Warm Regards</div>
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Rohit Khanna</div>
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Electronic Test & Measurement Engineer</div>
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London Centre for NANO Technology, UCL</div>
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Ph:+44-020-76799984</div>
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<span style="font-family: "Freestyle Script"; font-size: 18pt; color: rgb(33, 33, 33);">Lab:
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Int Ext: 39984</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of McKenna, Curtis <curtis.mckenna@louisville.edu><br>
<b>Sent:</b> 24 July 2024 15:30<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Metal in our DRIE</font>
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<p class="x_MsoNormal">Hi Labnetwork,</p>
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<p class="x_MsoNormal">We recently purchased a new DRIE and are left without any users for our older but still functional STS Multiplex ASE. We are currently debating selling off the tool or turning it into a “dirty” tool and allowing metals inside the chamber,
which has been a commonly requested process for as long as we have had it. I’m curious if anyone else has tried this with their DRIE and what kind of results you saw regarding the long-term viability of the tool.</p>
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<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black">Curt McKenna</span></p>
<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black">Facilities Manager, Micro/Nano Technology Center</span></p>
<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black">University of Louisville</span></p>
<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black">2210 South Brook Street</span></p>
<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black">Shumaker Research Building, Room 232</span></p>
<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black">Louisville, KY 40292</span></p>
<p class="x_MsoNormal"><span style="font-size:10.0pt; font-family:"Tahoma",sans-serif; color:black"><a href="http://louisville.edu/micronano" originalsrc="http://louisville.edu/micronano" shash="oGZGCZ0aI7EWcgcMhUdsG81rXk+d+12IDtZEVjjf0lgTo1FxprbToh56u2PPWzYfvgy+U1dwVIcn0+BassoSgx5vTHyDJJ+LAZcyUCftEs8n7RDDEHDRYDVJLa5THwLxXgCGec9x1ofjWqU8nKIMGxXSD9DC6d1fvpPCWkin4LE="><span style="color:blue">http://louisville.edu/micronano/</span></a></span></p>
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