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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">Hi<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">We occasionally allow metal in one of our systems but usually restricted to Cr or W. These are hopefully taken away rather than redepositing and leading to micro-masking of future etches.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">We had a problem several years ago when somebody used Al and it was a nightmare to get the chamber clean afterwards.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">Best<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">Peter<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Times New Roman",serif;mso-ligatures:none">Dr Peter Lomax,<br>
Principal Experimental Officer, The School of Engineering, The University of Edinburgh,<br>
Scottish Microelectronics Centre,<br>
Alexander Crum Brown Road, Edinburgh, EH9 3FF</span><span lang="EN-US" style="font-family:"Calibri",sans-serif;mso-ligatures:none"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:none">The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336.</span><span lang="EN-US" style="font-family:"Calibri",sans-serif;mso-ligatures:none"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-family:"Calibri",sans-serif;mso-ligatures:none">From:</span></b><span lang="EN-US" style="font-family:"Calibri",sans-serif;mso-ligatures:none"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>McKenna, Curtis<br>
<b>Sent:</b> 24 July 2024 15:30<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Metal in our DRIE<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Hi Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">We recently purchased a new DRIE and are left without any users for our older but still functional STS Multiplex ASE. We are currently debating selling off the tool or turning it into a “dirty” tool and allowing metals
inside the chamber, which has been a commonly requested process for as long as we have had it. I’m curious if anyone else has tried this with their DRIE and what kind of results you saw regarding the long-term viability of the tool.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Curt McKenna</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Facilities Manager, Micro/Nano Technology Center</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">University of Louisville</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">2210 South Brook Street</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Shumaker Research Building, Room 232</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black">Louisville, KY 40292</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"><a href="http://louisville.edu/micronano"><span style="color:blue">http://louisville.edu/micronano/</span></a></span><span lang="EN-US"><o:p></o:p></span></p>
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