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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have a Lesker PVD 75. It was working fine last week with a TiO2 target. This week I swapped out the target for WO3 and suddenly the plasma won’t strike.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Normal Operating Conditions:<o:p></o:p></p>
<p class="MsoNormal">Turbo 30% speed<o:p></o:p></p>
<p class="MsoNormal">Pressure 50mTorr of Argon<o:p></o:p></p>
<p class="MsoNormal">Power 50 W<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I tried putting the TiO2 target back and it wouldn’t strike either.<o:p></o:p></p>
<p class="MsoNormal">Usually I cut a circle of copper fabric and place it between the target and the sputter gun. That has worked for the past year. Usually when the plasma won’t strike, I need to replace the copper fabric. I tried that and it didn’t work.<o:p></o:p></p>
<p class="MsoNormal">Then I put some silver paste on the target and used the copper fabric and it worked! TiO2 had plasma strike.<o:p></o:p></p>
<p class="MsoNormal">I switched back to WO3, and used silver paste and copper fabric, but it won’t strike.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Here’s what I’ve tried:<o:p></o:p></p>
<p class="MsoNormal">Turbo 20, 30%<o:p></o:p></p>
<p class="MsoNormal">Pressure 15, 50, 60, 70, 95mTorr of Argon<o:p></o:p></p>
<p class="MsoNormal">Power 50, 60, 70 W<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Any suggestions? What do you normally put between the target and the sputter gun?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:none">Best,</span></i><span style="color:#242424;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:none">Tucson Richelson</span></i><span style="color:#242424;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-ligatures:none">-------------------------------------------------------------------------</span><span style="color:#242424;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424;mso-ligatures:none">Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)</span></b><span style="color:#242424;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#242424;mso-ligatures:none">University of Illinois</span></b><b><span style="font-size:12.0pt;font-family:"Verdana",sans-serif;color:#242424;mso-ligatures:none"><br>
</span></b><span style="color:#242424;mso-ligatures:none">Rm 2118, MC-249<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424;mso-ligatures:none">208 North Wright St. Urbana, IL 61801<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424;mso-ligatures:none">Office: +1 (217) 244-5138<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#242424;mso-ligatures:none">Web: <a href="http://mntl.illinois.edu/"><span style="color:#0563C1">http://mntl.illinois.edu/</span></a></span><span style="mso-ligatures:none"><o:p></o:p></span></p>
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<p class="MsoNormal">Schedule training: <a href="https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com">
<span style="color:blue">https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com</span></a><o:p></o:p></p>
<p class="MsoNormal">Give me feedback: <a href="https://forms.office.com/r/GawstR26J7">
<span style="color:blue">https://forms.office.com/r/GawstR26J7</span></a><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Helvetica",sans-serif">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject
to public disclosure.</span><span style="font-size:8.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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