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Hi all,
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<div>I am forwarding this message again as I haven’t received any response on this topic yet.</div>
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<div>Thanks </div>
<div>Aju</div>
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<div dir="ltr">Aju Jugessur Ph.D. MBA.
<div>Senior Director</div>
<div>COSINC </div>
<div>College of Engineering and Applied Science</div>
<div>University of Colorado Boulder</div>
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Begin forwarded message:<br>
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<div dir="ltr"><b>From:</b> Aju Jugessur <Aju.Jugessur@colorado.edu><br>
<b>Date:</b> July 30, 2024 at 5:06:17 PM MDT<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> <b>Etching III-V and Chalcogenide materials</b><br>
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<p class="MsoNormal"><span style="font-size:11.0pt">Hi all,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I am seeking some advice on any potential issues in terms of etch chamber contamination, process reproducibility and device performance (photonic waveguides) in the following scenario:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have a user etching <b>chalcogenide</b> material for photonic waveguide and ring resonator fabrication and applications. The tool is a PlasmaTherm ICP etcher.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">To date, the tool has been dedicated for chalcogenide material etching.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We now have interest from other users who would like to etch
<b>GaAs/AlGaAs</b> materials. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Does anyone in the network uses the same etch chamber for these two materials, especially to fabricate photonic structures? If yes, has there been any contamination issues that may impact the etch processes,
reproducibility and/or photonic device performance?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Any advice or suggestions would be greatly appreciated.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks so much,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Aju<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Aju Jugessur Ph.D., MBA, Sr. Member IEEE</span><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Senior Director<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Colorado Shared Instrumentation in Nanofabrication &<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Characterization (COSINC)</span><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">Member of Inclusive Culture Council (ICC)</span><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:none">University of Colorado Boulder | </span></b><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#B39C11;mso-ligatures:none">College
of Engineering & Applied Science</span></b><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<b>|
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-ligatures:none">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a></span><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#232333;background:white;mso-ligatures:none">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur"><span style="color:#954F72">https://cuboulder.zoom.us/my/<b>ajugessur</b></span></a></span><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><a href="http://www.colorado.edu/facility/cosinc"><span style="color:#954F72">www.colorado.edu/facility/cosinc</span></a></span><span style="font-family:"Calibri",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:"-webkit-standard",serif;color:black;mso-ligatures:none">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-ligatures:none"><o:p> </o:p></span></b></p>
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