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Hi Mingwei,</div>
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I would also be very curious to hear about this too! Our chlorine tool also has both gasses. This is what I do know:</div>
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-BCl3 and Oxygen should not mix in the chamber (will form Boric oxide which is a very-hard-to-remove solid ). Usually there is a purge between any steps containing O2 or BCl3</div>
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-Flammable gasses and oxygen should never mix in the chamber. The tool software we have prevents against flowing in oxygen with a flammable gas and I instruct people to never mix flammable gasses with any oxidizing gas in the chamber as an additional precaution.
So there would also have to be purges between those steps as well, though HBr (though corrosive and toxic) is not oxidizing or flammable as far as I see. </div>
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-Looking at the recipes we have on our tool, we do have some recipes with simultaneous Cl2 and HBr flow.
<i>HOWEVER</i>- these recipes were developed by users with no formal oversight or assessment until now, so just because they exist and we've not yet had a problem that I am aware of does not mean this is best practice. </div>
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Again, I would also be very curious to learn other peoples' experiences with these gasses and if there is something we should be doing better here as well. </div>
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Emma</div>
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<b>_____________________________________________</b></div>
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<b>Emma Anquillare, PhD</b></div>
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Research Scientist</div>
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ASRC Nanofabrication Facility</div>
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City University of New York</div>
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<i>Catalyzing Change, Celebrating Gains: </i></div>
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<i>A decade of visionary science for the public good.</i></div>
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<b>_____________________________________________</b></div>
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<b>Emma Anquillare, PhD</b></div>
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Research Scientist</div>
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<span style="font-size: 12pt;">ASRC </span><span style="font-size: 16px; background-color: rgb(255, 255, 255);">Nanofabrication Facility</span></div>
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<span style="background-color: rgb(255, 255, 255);">City University of New York</span></div>
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<i>Catalyzing Change, Celebrating Gains: </i></div>
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<i>A decade of visionary science for the public good.</i></div>
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